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Rapid chemical vapour-deposition of Si3N4

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References

  1. K. Niihara and T. Hirai, J. Mater. Sci. 11 (1976) 604.

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  2. Idem, ibid 11 (1976) 593.

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Authors and Affiliations

  1. The Research Institute for Iron, Steel and Other Metals, Tohoku University, 980, Sendai, Japan

    Toshio Hirai, Koichi Niihara & Takashi Goto

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  1. Toshio Hirai
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  2. Koichi Niihara
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  3. Takashi Goto
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Hirai, T., Niihara, K. & Goto, T. Rapid chemical vapour-deposition of Si3N4 . J Mater Sci 12, 631–632 (1977). https://doi.org/10.1007/BF00540292

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  • DOI: https://doi.org/10.1007/BF00540292

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