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Residual stresses in TiN-coated graphite

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Journal of Materials Science Letters

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References

  1. d. t. quinto, J. Vac. Sci. Technol. A 6 (1988) 2149.

    Google Scholar 

  2. r. jaschek and c. russel, Thin Solid Films 208 (1992) 7.

    Google Scholar 

  3. p. j. burnett and d. s. rickerby, J. Mater. Sci. 23 (1988) 2429.

    Google Scholar 

  4. l. chollet and a. j. perry, Thin Solid Films 123 (1985) 223.

    Google Scholar 

  5. c. c. chiu, Mater. Sci. Engng 150 (1992) 139.

    Google Scholar 

  6. Idem. J. Amer. Ceram. Soc. 73 (1990) 1999.

    Google Scholar 

  7. r. w. hoffman, Mater. Sci. Engng 53 (1982) 37.

    Google Scholar 

  8. e. kobeda and e. a. irene, J. Vac. Sci. Technol. B 6 (1988) 574.

    Google Scholar 

  9. s. c. lin and i. p. muraszkiewicz, J. Appl. Phys. 43 (1972) 119.

    Google Scholar 

  10. s. t. chen, c. h. yang, f. faupel and p. s. ho, ibid. 64 (1988) 6690.

    Google Scholar 

  11. a. shintani, s. sugaki and h. nakashima, ibid. 51 (1980) 4197.

    Google Scholar 

  12. c. c. chiu, J. Mater. Sci. in press.

  13. j. a. thornton and d. w. hoffman, J. Vac. Sci. Technol. 14 (1977) 164.

    Google Scholar 

  14. h. oikawa and y. nakajima, ibid. 14 (1977) 1153.

    Google Scholar 

  15. e. klokholm and b. s. berry, J. Electrochem. Soc. 115 (1968) 823.

    Google Scholar 

  16. l. m. mack, a. reisman and p. k. bhattacharya, ibid. 136 (1989) 3433.

    Google Scholar 

  17. b. wendler, Thin Solid Films 141 (1986) 223.

    Google Scholar 

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Chid, CC., Ma, YR. & Liou, Y. Residual stresses in TiN-coated graphite. J Mater Sci Lett 12, 1789–1790 (1993). https://doi.org/10.1007/BF00517611

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  • DOI: https://doi.org/10.1007/BF00517611

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