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Fresenius' Zeitschrift für analytische Chemie

, Volume 314, Issue 3, pp 300–300 | Cite as

Chemical analysis of thin semiconducting films using scanning auger electron spectroscopy

  • F. Birmans
  • J. Herion
  • G. Scharl
Original Papers and Abstracts of Lectures
  • 18 Downloads

Keywords

Spectroscopy Physical Chemistry Analytical Chemistry Inorganic Chemistry Auger 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Chemische Analysen dünner Halbleiterschichten mit der Raster-Augerelektronenspektroskopie

Literatur

  1. 1.
    Herion J, Niekisch EA, Scharl G (1980) Solar Energy Mater 4:101–112Google Scholar

Copyright information

© Springer-Verlag 1983

Authors and Affiliations

  • F. Birmans
    • 1
  • J. Herion
    • 1
  • G. Scharl
    • 1
  1. 1.Institut für FestkörperforschungKernforschungsanlage Jülich GmbHJülichFederal Republic of Germany

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