Combined electron gas SNMS and SIMS instrument for trace and depth profile analysis with high dynamic range

  • R. Jede
  • K. Seifert
  • G. Dünnebier
Lectures and Posters Methods and Instrumental Developments


Basic physics, technical implementation and applications of a combined SNMS and SIMS instrument improved in dynamic range and detection limits are discussed.


Physical Chemistry Analytical Chemistry Inorganic Chemistry Detection Limit Depth Profile 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Kombiniertes SNMS- und SIMS-Gerät zur spurenund Tiefenprofilanalyse mit großem dynamischem Bereich


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Copyright information

© Springer-Verlag 1987

Authors and Affiliations

  • R. Jede
    • 1
  • K. Seifert
    • 1
  • G. Dünnebier
    • 1
  1. 1.Leybold-Heraeus GmbHKöln 51Federal Republic of Germany

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