Advertisement

Combined electron gas SNMS and SIMS instrument for trace and depth profile analysis with high dynamic range

  • R. Jede
  • K. Seifert
  • G. Dünnebier
Lectures and Posters Methods and Instrumental Developments

Summary

Basic physics, technical implementation and applications of a combined SNMS and SIMS instrument improved in dynamic range and detection limits are discussed.

Keywords

Physical Chemistry Analytical Chemistry Inorganic Chemistry Detection Limit Depth Profile 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Kombiniertes SNMS- und SIMS-Gerät zur spurenund Tiefenprofilanalyse mit großem dynamischem Bereich

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    Oechsner H, Gerhard W (1975) Z Phys B221:41Google Scholar
  2. 2.
    Lipinsky D, Jede R, Ganschow O, Benninghoven A (1985) J Vac Sci Technol A3:2007Google Scholar
  3. 3.
    Oechsner H (1984) In: Oechsner H (ed) Thin film and depth analysis. Topics in current physics, vol 37. Springer, Berlin Heidelberg New York Tokyo, p 63Google Scholar
  4. 4.
    Müller K-H, Seifert K, Wilmers M (1985) J Vac Sci Technol A3:1367Google Scholar
  5. 5.
    Oechsner H, Paulus H, Beckmann P (1985) J Vac Sci Technol A3:1403Google Scholar
  6. 6.
    Winograd N, Baxter JP, Kimock FM (1982) Chem Phys Lett 88:581Google Scholar
  7. 7.
    Becker CH, Gillen KT (1984) Anal Chem 56:1671Google Scholar
  8. 8.
    Hofer WO, Giber J, Schou J (1983) Fresenius Z Anal Chem 314:220Google Scholar
  9. 9.
    Chen FF (1974) In: Introduction to plasma physics. Plenum Press, New York LondonGoogle Scholar
  10. 10.
    Oechsner H (1970) Z Phys 238:433Google Scholar
  11. 11.
    Wittmaack K (1982) Vacuum 32:65Google Scholar
  12. 12.
    Oechsner H (1975) Appl Phys 8:185Google Scholar
  13. 13.
    Oechsner H, Bachmann G, Beckmann P, Kopnarski M, Reed DA, Baumann SM, Williams SD, Evans CA (1986) In: Benninghoven A, Colten RJ, Simons DS, Werner HW (eds) Secondary ion mass spectrometry SIMS V. Springer series in chemical physics 44. Springer, Berlin Heidelberg New York Tokyo, p 371Google Scholar
  14. 14.
    Jede R (1987) submitted to Technisches MessenGoogle Scholar

Copyright information

© Springer-Verlag 1987

Authors and Affiliations

  • R. Jede
    • 1
  • K. Seifert
    • 1
  • G. Dünnebier
    • 1
  1. 1.Leybold-Heraeus GmbHKöln 51Federal Republic of Germany

Personalised recommendations