Combined electron gas SNMS and SIMS instrument for trace and depth profile analysis with high dynamic range

  • R. Jede
  • K. Seifert
  • G. Dünnebier
Lectures and Posters Methods and Instrumental Developments

Summary

Basic physics, technical implementation and applications of a combined SNMS and SIMS instrument improved in dynamic range and detection limits are discussed.

Keywords

Physical Chemistry Analytical Chemistry Inorganic Chemistry Detection Limit Depth Profile 

Kombiniertes SNMS- und SIMS-Gerät zur spurenund Tiefenprofilanalyse mit großem dynamischem Bereich

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Copyright information

© Springer-Verlag 1987

Authors and Affiliations

  • R. Jede
    • 1
  • K. Seifert
    • 1
  • G. Dünnebier
    • 1
  1. 1.Leybold-Heraeus GmbHKöln 51Federal Republic of Germany

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