Skip to main content
SpringerLink
Log in

On the post-etching of diamond thin films in a hydrogen-oxygen atmosphere

  • Published:
Journal of Materials Science Letters

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

References

  1. Y. Saito, K. Sato, H. Tanaka, K. Fujita and S. Matuda, J. Mater. Sci. 23 (1988) 842.

    Google Scholar 

  2. J. H. Stephen and A. M. Weiner, Appl. Phys. Lett. 55 (1989) 2179.

    Google Scholar 

  3. J. A. Mucha, D. L. Flamm and D. E. Ibbotson, J. Appl. Phys. 65 (1989) 3448.

    Google Scholar 

  4. Y. Muranaka, H. Yamashita and H. Miyadera, Thin Solid Films 195 (1991) 257.

    Google Scholar 

  5. Y. Hirose and Y. Terasawa, Jpn. J. Appl. Phys. 25 (1986) L519.

    Google Scholar 

  6. C. F. Chen, K. Nishimura, E. Ko, E. Ogawa, S. Hosomi and I. Yoshida, Surf. Coatings Technol. 43/44 (1990) 53.

    Google Scholar 

  7. N. Uchida, T. Kurita, K. Uematsu and K. Saito, J. Mater. Sci. Lett. 9 (1990) 249.

    Google Scholar 

  8. Idem, ibid. 9 (1990) 251.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Materials Research Department, Beijing General Research Institute of Mining and Metallurgy, 100044, Beijing, People's Republic of China

    Peng Xiling & Chen Xiaolin

Authors
  1. Peng Xiling
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Chen Xiaolin
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Xiling, P., Xiaolin, C. On the post-etching of diamond thin films in a hydrogen-oxygen atmosphere. J Mater Sci Lett 12, 687–689 (1993). https://doi.org/10.1007/BF00465593

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00465593

Keywords

Search

Navigation