Journal of Materials Science Letters

, Volume 14, Issue 23, pp 1641–1642 | Cite as

Interfacial reactions between AIN substrate and Zr thin films

  • Yong Du
  • Xiang
  • Jun He
  • Kun Tao
Article
  • 20 Downloads

Keywords

Polymer Thin Film Interfacial Reaction 

References

  1. 1.
    R. R. Tummala, Amer. Ceram. Soc. Bull. 67 (1988) 752.Google Scholar
  2. 2.
    N. Iwase, K. Anzai and K. Shinozaki, Solid State Technol. 29 (1986) 135.Google Scholar
  3. 3.
    T. Corts, A. Traverse and W. Bolse, Nucl. Instr. Meth. B80/81 (1993) 167.Google Scholar
  4. 4.
    N. Chida, H. Fujinuma, M. Matsuura and S. Tsukahara, J. Ceram. Soc. Jpn. 100 (1992) 417.Google Scholar
  5. 5.
    A. H. Carim and R. E. Loehman, J. Mater. Res. 5 (1990) 1520.Google Scholar
  6. 6.
    K. Takahashi, S. Kouzuma, Y. Takahashi and K. Nishiguchi, Vacuum 44 (1993) 791.Google Scholar
  7. 7.
    T. Yasumoto, K. Yamakawa, N. Iwase and N. Shinosawa, J. Ceram. Soc. Jpn. 101 [9] (1993) 969.Google Scholar

Copyright information

© Chapman & Hall 1995

Authors and Affiliations

  • Yong Du
    • 1
  • Xiang
    • 1
  • Jun He
    • 1
  • Kun Tao
    • 1
  1. 1.Department of Materials Science and EngineeringTsingHua UniversityBeijingPeople's Republic of China

Personalised recommendations