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OH-related capacitance-voltage recovery effect in metal-oxide-semiconductor capacitors passivated by ZnO-B2O3-P2O5-SiO2 glasses Part II The effects of P 2 O 5 content

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Journal of Materials Science Letters

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  1. Toshiba ULSI Research Center, 1-Komukai Toshiba-cho Kawasaki, Japan

    K. Kobayashi

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  1. K. Kobayashi
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Kobayashi, K. OH-related capacitance-voltage recovery effect in metal-oxide-semiconductor capacitors passivated by ZnO-B2O3-P2O5-SiO2 glasses Part II The effects of P 2 O 5 content . J Mater Sci Lett 13, 1446–1447 (1994). https://doi.org/10.1007/BF00419130

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  • DOI: https://doi.org/10.1007/BF00419130

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