Abstract
In the CH3SiCl3-H2 CVD system, from which SiC-based films are prepared, the supersaturation of the gas phase increases when temperature and total pressure decreases and when a diffusion-controlled kinetic process is changed in a reaction-controlled one. These conditions variations seem to induce a transition from a growth regime to a nucleation regime, as evidenced by a study of the initial stages of the deposition. A transition from a crystallized film with columnar crystals to a nanocrystalline deposit is also reported on the basis of accurate experiments using TEM and related techniques.
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Lespiaux, D., Langlais, F., Naslain, R. et al. Correlations between gas phase supersaturation, nucleation process and physico-chemical characteristics of silicon carbide deposited from Si-C-H-Cl system on silica substrates. Journal of Materials Science 30, 1500–1510 (1995). https://doi.org/10.1007/BF00375255
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DOI: https://doi.org/10.1007/BF00375255