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Synthesis and properties of Fe3C film by r.f. magnetron sputtering

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Abstract

Fe3C film, which is a promising new magnetic recording material, can be synthesized by r.f. magnetron sputtering. Several graphite plates were attached to an iron plate to adjust the area of a composite target for the control of film composition. The crystalline phases in a film changed from Fe-C solid solution to Fe3C with increasing substrate temperature from 350 °C and above. Sputtering at an argon pressure of 5 Pa was favourable for the formation of crystalline Fe3C film. All Fe3C films showed in-plane magnetization. The saturation magnetization of the film was around 100–120 e.m.u. g−1 regardless of the deposition conditions. The coercivity of the films increased from 1 Oe to 250 Oe with increasing substrate temperature, and the coercivity remained constant at 250 Oe at 350 °C, regardless of argon pressure.

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Authors and Affiliations

  1. Department of Applied Chemistry, School of Engineering, Nagoya University, Furo-cho,Chikusa-ku, 464-01, Nagoya, Japan

    S. Tajima & S. Hirano

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  1. S. Tajima
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  2. S. Hirano
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Tajima, S., Hirano, S. Synthesis and properties of Fe3C film by r.f. magnetron sputtering. JOURNAL OF MATERIALS SCIENCE 28, 2715–2720 (1993). https://doi.org/10.1007/BF00356208

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