Abstract
We report on the ion-beam mixing processes of Sb/Ni marker layers and bilayers under the irradiation of ions ranging from He to Pb, at 80 K and at room temperature. The concentration profiles are obtained by Rutherford backscattering spectroscopy with 900 keV α-particles. At 80 K, the bilayer mixing rates cannot be reproduced by purely ballistic mixing; the essentially linear scaling of the bilayer mixing rate with the energy F D deposited at the interface points to local spike formation. A transition to global spike formation seems to be visible for the Pb-irradiations. Additional mixing effects at 300 K are due to radiation enhanced diffusion and scale with √F D. The marker mixing rates at 80 K are reproduced by the ballistic mixing approach, but are equally well described by local spike models. High fluence Xe-irradiations of Sb/Ni bilayers lead to intermetallic phases in the interface region as verified by transmission electron microscopy.
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References
R.S. Averback: Nucl. Instrum. Methods B 15, 675 (1986)
D. Peak, R.S. Averback: Nucl. Instrum. Methods B 7/8, 657 (1985)
Y.-T. Cheng: Mater. Sci. Rep. 5, 45 (1990)
M. Nastasi, J.W. Mayer: Mater. Sci Rep. 6, 1 (1991)
W.L. Johnson, Y.-T. Cheng, M. Van Rossum, M.A. Nicolet: Nucl. Instrum. Methods B 7/8, 657 (1985)
P. Sigmund, A. Gras-Marti: Nucl. Instrum. Methods B 182/183, 25 (1981)
H.H. Andersen: J. Appl. Phys. 18, 131 (1979)
P. Børgesen, D.A. Lilienfeld, H.H. Johnson: Appl. Phys. Lett. 14, 57 (1990)
W. Bolse: Nucl. Instrum. Methods B 80/81, 137 (1993)
T. Weber, K.P. Lieb: J. Appl. Phys. 73, 3499 (1993)
T. Kacsich, T. Weber, W. Bolse, K.P. Lieb: Appl. Physics A 56, 2881 (1993)
T.P. Massalski (ed.): Binary Alloy Phase Diagrams (Am. Soc. Metals, Ohio 1986)
A.K. Niessen et al.: Physica B 152, 303 (1988)
F. Shi, T. Weber, W. Bolse, K.P. Lieb: Nucl. Instrum. Methods B 80/81, 167 (1993)
M. Uhrmacher, P. Wodniecki, F. Shi, T. Weber, K.P. Lieb: Appl. Phys. A 57, 353 (1993)
P. Wodniecki, M. Uhrmacher: Appl. Phys. A 57 (1993, in press)
M. Uhrmacher, K. Pampus, F.J. Bergmeister, D. Purschke, K.P. Lieb: Nucl. Instrum. Methods B 9, 234 (1985)
J.C. Bravman, R. Sinclair: J. Electron. Microsc. Tech. 1, 53 (1984)
L.R. Doolittle: Nucl. Instrum. Methods B 9, 344 (1985); B 15, 227 (1986)
J.P. Biersack, L.G. Haggmark: Nucl. Instrum. Methods B 174, 257 (1980)
P. Børgesen, D.A. Lilienfeld, H. Msaad: Nucl. Instrum. Methods B 59/60, 563 (1991)
F. Shi, W. Bolse, K.P. Lieb: Nucl. Instrum. Methods B (1994), submitted
Landolt-Börnstein, New Series 111/26 (Springer, Berlin, Heidelberg 1991)
G.H. Vineyard: Radiat. Eff. 32, 245 (1976)
L.-U. Aaen Andersen, J. Bøttiger, K. Dyrbye: Nucl. Instrum. Methods B 51, 125 (1990)