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Structural properties of high-quality sputtered Fe films on Al2O3(1120) and MgO(001) substrates

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Abstract

High-quality thin Fe films were deposited on MgO(001) and Al2O3(1120) substrates in the thickness range from 7 to 50 nm. The structural properties have been studied by out-of-plane and in-plane X-ray scattering experiments. From the out-of-plane measurements the electron density profile was determined together with interface and surface roughness parameters. Fe on Al2O3 grows along the [110]-direction with a structural coherence length comprising about the total film thick ness and a very small mosaicity. From in-plane scattering experiments a three-domain structure was observed. On MgO(001) substrates Fe grows in the [001]-direction, with the Fe [100]-axis parallel to the MgO [110]-axis. On both substrates, the Fe films exhibit a very small surface and interface roughness, indicative for a high quality of the sputtered samples.

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Authors and Affiliations

  1. Institut für Experimentalphysik/Festkörperphysik, Fakultät für Physik und Astronomie, Ruhr Universität Bochum, D-44780, Bochum, Germany

    Th. Mühge, A. Stierle, N. Metoki & H. Zabel

  2. Fachbereich Physik, Universität Potsdam, Am neuen Palais 10, D-14469, Potsdam, Germany

    U. Pietsch

Authors
  1. Th. Mühge
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  2. A. Stierle
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  3. N. Metoki
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  4. H. Zabel
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  5. U. Pietsch
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Mühge, T., Stierle, A., Metoki, N. et al. Structural properties of high-quality sputtered Fe films on Al2O3(1120) and MgO(001) substrates. Appl. Phys. A 59, 659–665 (1994). https://doi.org/10.1007/BF00331928

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  • DOI: https://doi.org/10.1007/BF00331928

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