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Laser-assisted photoelectric optogalvanic analysis of thin films and surfaces using a hollow-cathode glow discharge

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Abstract

It is shown that substitution of the spectral line intensity with the photoelectric optogalvanic signal in the hollow-cathode glow discharge enhances the ability for layer-by-layer spectral analysis of surfaces and layers. In particular, this approach improves substantially the thin-film thickness measurements and analysis accuracy.

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Authors and Affiliations

  1. Institute of Solid State Physics, Bulgarian Academy of Sciences, Blvd. Trakia 72, 1784, Sofia, Bulgaria

    R. Djulgerova & V. Mihailov

Authors
  1. R. Djulgerova
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  2. V. Mihailov
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Djulgerova, R., Mihailov, V. Laser-assisted photoelectric optogalvanic analysis of thin films and surfaces using a hollow-cathode glow discharge. Appl. Phys. B 56, 301–305 (1993). https://doi.org/10.1007/BF00325220

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  • DOI: https://doi.org/10.1007/BF00325220

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