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Cluster emission under ion bombardment of metallic targets

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Abstract

Mass spectroscopic studies of the neutral particles sputtered by Ar+ ions at 8 keV from polycrystaline samples have been performed, using non-resonant laser ionization and subsequent time-of-flight mass spectroscopy. Besides sputtered atoms, also dimer and trimer contributions in the order of 10−1 to 10−2 and 10−3 to 10−4, respectively, are found in the sputtered flux. The data obtained here together with previously published data by other groups for different bombarding energies provide strong support for the validity of the recombination model.

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  1. Institut für allgemeine Physik, Technische Universität, Wiedner Hauptstrasse 8-10/134, A-1040, Wien, Austria

    P. Wurz, W. Husinsky & G. Betz

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  1. P. Wurz
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  2. W. Husinsky
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  3. G. Betz
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Wurz, P., Husinsky, W. & Betz, G. Cluster emission under ion bombardment of metallic targets. Appl. Phys. A 52, 213–217 (1991). https://doi.org/10.1007/BF00324422

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