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Preparation of high J c YBa2Cu3O7−δ superconducting thin films by ion beam sputtering deposition

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Abstract

Preparation of high T c and high J c YBa2Cu3O7−δ superconducting thin films by ion beam sputtering deposition is reported. The main factors affecting the composition of the films and the orientation of the crystal grains have been examined. Experimental results show that the Y, Ba and Cu composition of as-deposited films can be conveniently and accurately adjusted by a combined sputtering target which consists of a large sintered target of YBa2Cu3O7−δ and a small one that is Ba and Cu rich (YBa2.5Cu3.3Ox). Fabrication conditions of highly oriented superconducting thin films are described. YBa2Cu3O7−δ superconducting films with zero resistance at 88–90.5K and critical current density J c (at 77K) of 1.5×105 A/cm2 are obtained.

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References

  1. P. Chaudhari, R.H. Koch, R.B. Laibowitz, T.R. McGuire, R.J. Gambino: Phys. Rev. Lett. 58, 2648 (1987)

    Google Scholar 

  2. D. Madakson, J.J. Guomo, D.S. Yee, R.A. Roy, G. Scilla: J. Appl. Phys. 63, 2046 (1988)

    Google Scholar 

  3. X.X. Xi, G. Linker, O. Meyer, E. Nold, B. Obst, F. Ratzel, R. Smithey, B. Strehlau, F. Weschenfelder, J. Geerk: Z. Phys. B 74, 13 (1989)

    Google Scholar 

  4. Y. Enomoto, T. Murakami, M. Suzuki, K. Moriwaki: Jpn. J. Appl. Phys. 26, L 1248 (1987)

    Google Scholar 

  5. T. Venkatesan, X.D. Wu, B. Dutta, A. Inam, M.S. Megde, D.M. Hwang, C.C. Chang, L. Nazar, B. Wilkens: Appl. Phys. Lett. 54, 581 (1989)

    Google Scholar 

  6. K. Watanabe, H. Yamane, H. Kurosawa, T. Hirai, N. Kobayashi, H. Iwasaki, K. Noto, Y. Muto: Appl. Phys. Lett. 54, 575 (1989)

    Google Scholar 

  7. Y.C. Zhang, Y.M. Wu, C.X. Ren, X.D. Fu, G.M. Chen: Nucl. Instrum. Meth. B 6, 447 (1985)

    Google Scholar 

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Authors and Affiliations

  1. Ion Beam Laboratory, Shanghai Institute of Metallurgy, Academia Sinica, 200050, Shanghai, PR China

    Ren Congxin, Chen Guoliang, Chen Jianmin, Yang Jie, Li Yijie, Chen Zhengxiu, Wang Le, Xie Leiming & Zou Shichang

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  1. Ren Congxin
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  2. Chen Guoliang
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  3. Chen Jianmin
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  4. Yang Jie
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  5. Li Yijie
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  6. Chen Zhengxiu
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  7. Wang Le
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  8. Xie Leiming
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  9. Zou Shichang
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Ren, C., Chen, G., Chen, J. et al. Preparation of high J c YBa2Cu3O7−δ superconducting thin films by ion beam sputtering deposition. Appl. Phys. A 52, 203–205 (1991). https://doi.org/10.1007/BF00324419

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  • DOI: https://doi.org/10.1007/BF00324419

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