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Direct writing and in-situ material processing by a laser-micromachining projection microscope

  • Surfaces And Multilayers
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Abstract

The new laser micromachining projection microscope enables a surface to be viewed at high magnification with a built-in facility for micromachining of the same surface according to a predetermined pattern. A XeCl-excimer laser forms part of the device and provides bright viewing illumination in amplified spontaneous emission as well as a small laser spot of sufficient fluence to mark the sample surface. The basic characteristics of image enhancement in the excimer amplifier are presented. The advantage of such a technique for both pattern generation, surface cleaning and mask correction is demonstrated on Al, Cu and W specimens with a spatial resolution better than 3 μm.

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Authors and Affiliations

  1. Department of Optics and Quantum Electronics, JATE University, Dóm tér 9, H-6720, Szeged, Hungary

    K. Osvay, Z. Bor & B. Rácz

  2. Angewandte Physik, Johannes Kepler University Linz, A-4040, Linz, Austria

    J. Heitz

Authors
  1. K. Osvay
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  2. Z. Bor
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  3. B. Rácz
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  4. J. Heitz
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Osvay, K., Bor, Z., Rácz, B. et al. Direct writing and in-situ material processing by a laser-micromachining projection microscope. Appl. Phys. A 58, 211–214 (1994). https://doi.org/10.1007/BF00324377

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  • DOI: https://doi.org/10.1007/BF00324377

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