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Reaction of Cu and Cl2 stimulated by synchrotron radiation

  • Surfaces And Muitilayers
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Abstract

Light-induced reactions of poly-Cu with Cl2 and the formation of CuCl x films were studied in the spectral range of 105–400 nm by using synchrotron radiation. The efficiencies of the reactions with Cl2 pressures between 10−5 and 10−2 mbar were determined from the height distributions of spatial structures in the CuCl x films. The heights typically range from 10 to 104 nm. An efficiency of about 107 CuCl x molecules per dissociated Cl2 molecule is observed at high Cl2 exposures. At low Cl2 pressures CuCl x formes anisotropically in the irradiated area. The efficiency is determined by light-induced surface processes supporting the build up of CuCl x in the long wavelength range and competing processes at short wavelengths which reduce the efficiency.

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References

  1. N.G. Einspruch, D.M. Brown: Plasma Processing for VLSI; VLSI Electronics Microstructure Sci., Vol. 8 (Academic, New York 1984)

    Google Scholar 

  2. M. Hirose: Photon, Beam and Plasma Assisted Processing, ed. by I.W. Boyd, E.F. Krimmel (Elsevier, New York 1989) p. xvii

    Google Scholar 

  3. D. Bäuerle: Chemical Processing with Lasers, Springer Series Mater. Sci., Vol. 1 (Springer, Berlin, Heidelberg 1986)

    Google Scholar 

  4. T.J. Chuang: J. Vac. Sci. Technol. 21, 798 (1982)

    Google Scholar 

  5. W. Sesselmann, T.J. Chuang: J. Vac. Sci. Technol. B 3, 1507 (1985)

    Google Scholar 

  6. J.H. Brannon, K.W. Brannon: J. Vac. Sci. Technol. B 7, 1275 (1989)

    Google Scholar 

  7. S. Affrossman, R.T. Bailey, C.H. Cramer, F.R. Cruicksbank, J.M.R. MacAllister, J. Alderman: Appl. Phys. A 49, 533 (1989)

    Google Scholar 

  8. D.J. Ehrlich: Appl. Phys. Lett. 38, 1019 (1981)

    Google Scholar 

  9. Q.Z. Qin, Y.L. Li, Z.K. Jin, Z.J. Zhang, Y.Y. Yang, W.J. Jia, Q.K. Zheng: Surf. Sci. 207, 142–158 (1988)

    Google Scholar 

  10. H. Okano, Y. Horiike, I. Sekine: Jpn. J. Appl. Phys. 24, 68 (1985)

    Google Scholar 

  11. T.S. Baller, G.N.A. van Veen, J. Dieleman: J. Vac. Sci. Technol. A 6, 1409 (1988)

    Google Scholar 

  12. G.S. Oehrlein, S.W. Robey, J.L. Lindström: Appl. Phys. Lett. 52, 1170 (1988)

    Google Scholar 

  13. J.L. Peyre, Ch. Vannier, D. Riviere, G. Villela: Appl. Surf. Sci. 36, 313 (1989)

    Google Scholar 

  14. D.J. Ehrlich, R.M. Osgood Jr., T.F. Deutsch: Appl. Phys. Lett. 38, 1018 (1981)

    Google Scholar 

  15. N. Hayasaka, A. Hiraya, K. Shobatake: Jpn. J. Appl. Phys. 26, L1110 (1987)

  16. K. Shobatake, H. Ohashi, K. Fukui, A. Hiraya, N. Hayasaka, H. Okano, A. Yoshida, H. Kume: Appl. Phys. Lett. 56, 2189 (1990)

    Google Scholar 

  17. H. Kyuragi, T. Urisu: Appl. Phys. Lett. 50, 1254 (1987)

    Google Scholar 

  18. S. Terakado, J. Nishino, M. Morigami, M. Harada, S. Suzuki, K. Tanaka, J. Chikawa: Jpn. J. Appl. Phys. 29, L709 (1990)

  19. P.J. Goddard, R.M. Lambert: Surf. Sci. 67, 180 (1977)

    Google Scholar 

  20. D. Westphal, A. Goldmann: Surf. Sci. 131, 92 (1983)

    Google Scholar 

  21. S. Park, T.N. Rhodin, L.C. Rathbun: J. Vac. Sci. Technol. A 4, 168 (1986)

    Google Scholar 

  22. K.N. El'tsov, G. Ya. Zueva, A.N. Klimov, V.V. Martynov, A.M. Prokhorov: Surf. Sci. 251/252, 753 (1991)

    Google Scholar 

  23. W. Sesselmann, T.J. Chuang: Surf. Sci. 176, 32 (1986); ibid. 176, 67 (1986)

    Google Scholar 

  24. H.F. Winters: J. Vac. Sci. Technol. A 3, 786 (1985)

    Google Scholar 

  25. W. Sesselmann, E.E. Marinero, T.J. Chuang: Appl. Phys. A 41, 209 (1986)

    Google Scholar 

  26. G.N.A. van Veen, T.S. Baller, J. Dieleman: Appl. Phys. A 47, 183 (1988)

    Google Scholar 

  27. J. Bahrdt, P. Gürtler, N. Schwentner: J. Chem. Phys. 86, 6108 (1987)

    Google Scholar 

  28. J. Bahrdt: Dissertation, Free University Berlin (1987)

  29. S.D. Peyerimhoff, R.J. Buenker: Chem. Phys. 57, 279 (1981)

    Google Scholar 

  30. F. Grein, S.D. Peyerimhoff, J. Buenker: Can. J. Phys. 62, 1928 (1984)

    Google Scholar 

  31. Handbook of Chemistry and Physics, 56th edn. by R.C. Weast (CRC Press, Cleveland, OH 1975) p. F-218

  32. P.A. Dowben: Cirt. Rev. Solid State Mater. Sci. 13, 191 (1987)

    Google Scholar 

  33. E. Hasselbrink: Appl. Phys. A 53, 403 (1991)

    Google Scholar 

  34. V. Liberman, G. Haase, R.M. Osgood Jr.: Chem. Phys. Lett. 176, 379 (1991)

    Google Scholar 

  35. V. Liberman, G. Haase, R.M. Osgood Jr.: J. Chem. Phys. 96, 1590 (1992)

    Google Scholar 

  36. H.J. Hageman, W. Gudat, C. Kunz: J. Opt. Soc. Am. 65, 742 (1975)

    Google Scholar 

  37. M. Cardona: Phys. Rev. 129, 69 (1963)

    Google Scholar 

  38. D.H. Seib, W.E. Spicer: Phys. Rev. B 2, 1676 (1970)

    Google Scholar 

  39. M.V. Kurepa, D.S. Belic: J. Phys. B 11, 3719 (1978)

    Google Scholar 

  40. D.L. McCorkle, A.A. Christodoulides, L.G. Christophorou: Chem. Phys. Lett. 109, 276 (1984)

    Google Scholar 

  41. K. Watanabe, T. Nakayama, J. Mottl: J. Quantum Spectrosc. Radiat. Transfer 2, 369 (1965)

    Google Scholar 

  42. J.G. McCaffrey, H. Kunz, N. Schwentner: J. Chem. Phys. 96, 155 (1992)

    Google Scholar 

  43. N. Cabrera, N.F. Mott: Rept. Progr. Phys. 12, 163 (1949)

    Google Scholar 

  44. H. Okabe: Photochemistry of Small Molecules (Wiley, New York 1978) p. 185

    Google Scholar 

  45. C. Roxlo, A. Mandl: J. Appl. Phys. 51, 2969 (1980)

    Google Scholar 

  46. L.C. Lee, M. Suto: J. Chem. Phys. 84, 5277 (1986)

    Google Scholar 

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Li, B., Twesten, I. & Schwentner, N. Reaction of Cu and Cl2 stimulated by synchrotron radiation. Appl. Phys. A 56, 355–364 (1993). https://doi.org/10.1007/BF00324356

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