Skip to main content
Log in

Electrical properties of polyimide on n-GaAs (100) interfaces by a pulsed laser evaporation technique

  • Surfaces And Muitilayers
  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

Incorporation of a thin insulating layer of polymer-like polyimide deposited by pulsed laser evaporation technique between metal and n-GaAs has resulted in diode structures with MIS and Schottky-barrier-type capacitance-voltage and current-voltage characteristics. These structures have the potential to be useful in improving the performance of GaAs FETs for microwave and high-speed applications.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. R.N. Bhargawa: J. Cryst. Growth 86, 873 (1988)

    Google Scholar 

  2. J.M. Depuydth, H. Cheng, J.E. Potts, T.L. Smith, S.K. Mohapatra: J. Appl. Phys. 62, 4756 (1987)

    Google Scholar 

  3. K. Mohamade, D.A. Cammack, R. Dalby, P. Newbury, B.L. Bhargawa: Appl. Phys. Lett. 50, 37 (1987)

    Google Scholar 

  4. T. Yao, T. Takeda: Appl. Phys. Lett. 48, 160 (1986)

    Google Scholar 

  5. R. Srinivasan, B. Braren, R.W. Dreyfus: J. Appl. Phys. 61, 372 (1987)

    Google Scholar 

  6. S.G. Hansen, T.E. Robitaille: Appl. Phys. Lett. 52, 81 (1988)

    Google Scholar 

  7. M. Hanabusa, S. Moriyana, H. Kikuchi: Thin Solid Films 107, 227 (1983)

    Google Scholar 

  8. G.P. Schwartz, V.E. Bondtbey, J.H. English, G.J. Gualier: Appl. Phys. Lett. 42, 9523 (1983)

    Google Scholar 

  9. J.T. Cheng: Material Res. Soc. Symmp. Proc. 29, 301 (1984)

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Additional information

IICT communication No. 2934

Rights and permissions

Reprints and permissions

About this article

Cite this article

Chaudhari, G.N., Rao, V.J. Electrical properties of polyimide on n-GaAs (100) interfaces by a pulsed laser evaporation technique. Appl. Phys. A 56, 353–354 (1993). https://doi.org/10.1007/BF00324355

Download citation

  • Revised:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00324355

PACS

Navigation