Skip to main content
SpringerLink
Log in

Temperature effect on photolytic deposition of platinum ohmic contacts and schottky diodes

  • Surfaces And Multilayers
  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

An argon laser is used to induce Laser Chemical Vapor Deposition (LCVD) of platinum using platinum bihexafluoroacetyl-acetonate as precursor. The process can be photolytic or pyrolytic depending on the laser power used. These processes are studied by recording the laser light transmitted through of deposit and substrate. Photolytic deposition takes place either in the adsorbed phase or in the gaseous phase depending on the temperature induced by radiation absorption. The induced-temperature calculation using a model developed by us confirms the experimental results obtained. The influence of the substrate base temperature and the precursor product vapour pressure confirms photolytic deposition from the adsorbed phase for low powers and from the vapour phase onwards for high powers. The deposits obtained present a typical 96% Pt composition and its use in Schottky diode manufacture permit obtaining devices with good characteristics in spite of experimental limitations.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. D. Bauerle: Chemical Processing with Laser, Springer Ser. Mat. Sci. 1 (Springer, Berlin, Heidelberg 1986)

    Google Scholar 

  2. R. Solanki, W.H. Ritchie, C.J. Collins: Appl. Phys. Lett. 43, 454 (1983)

    Google Scholar 

  3. P.K. Boyer, C.A. Moore, R. Solanki, W.H. Ritchie, G.A. Roche, G.J. Collins: In Laser Diagnostic and Photochemical Processing for Semiconductor Devices, ed. by R.M. Osgood, S.R.J. Brueck, H.R. Schlossberg (North-Holland, New York 1983) p. 119

    Google Scholar 

  4. R.W. Andreatta, D. Lubben, J.G. Eden, J.E. Green: J. Vac. Sci. Technol. 20, 740 (1982)

    Google Scholar 

  5. H. Beneking: In Laser Diagnostics and Photochemical Processing for Semiconductor Devices, ed. by R.M. Osgood, S.R.J. Brueck, H.R. Schlossberg (North-Holland, New York 1983) p. 188

    Google Scholar 

  6. C.R. Moylan, T.H. Baum, C.R. Jones: Appl. Phys. A 40, 1 (1986)

    Google Scholar 

  7. J.G. Black, S.P. Doran, M. Rothschild, D.J. Ehrlich: Appl. Phys. Lett. 50, 1016 (1987)

    Google Scholar 

  8. G.E. Blonden, G.S. Higashi, C.G. Fleming: Appl. Phys. Lett. 50, 766 (1987)

    Google Scholar 

  9. R. Solanki, P.K. Boyer, J.E. Mahan, G.J. Collins: Appl. Phys. Lett. 38, 572 (1981)

    Google Scholar 

  10. C. Garrido, B. León, M. Pérez-Amor: J. Appl. Phys. 69, 1133 (1991)

    Google Scholar 

  11. T.H. Wood, J.C. White, B.A. Thacker: Appl. Phys. Lett. 42, 408 (1983)

    Google Scholar 

  12. M. Boudart, G. Djega-Mariadassou: Kinetic of Heterogeneous Catalytic Reactions (Princeton Univ. Press, Princeton, NJ 1981)

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Electrical Engineering, University of Vigo, E-36280, VIGO, Spain

    C. Garrido

  2. Laboratoire de Chimie Technique, Ecole Politechnique, Fédérale de Lausanne, CH-1015, Lausanne, Switzerland

    H. van den Bergh

Authors
  1. C. Garrido
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. H. van den Bergh
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Garrido, C., van den Bergh, H. Temperature effect on photolytic deposition of platinum ohmic contacts and schottky diodes. Appl. Phys. A 53, 265–272 (1991). https://doi.org/10.1007/BF00324263

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00324263

PACS

Search

Navigation