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Blow-off of aluminium films

  • Surfaces And Multilayers
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Abstract

The blow-off of Al targets from a transparent support by single pulses of intense laser irradiation through the support is investigated for target thicknesses up to some μm. The blow-off process is theoretically described by calculations of the phase front dynamics in the target, adopted from Harrach's analytical solutions for laser heating and burnthrough of opaque solid slabs. Experimentally two laser beam sources were used: a Nd:YAG laser with a Gaussian intensity profile and a Nd:Glass-laser system with a homogenized flat-top profile. Two types of removal mechanism could be identified. In the first mode (low laser intensities and/or thin targets) the target is completely molten and can easily be blown-off by the vapor originating at the target-support interface. In the second mode (high laser intensities and/or thick targets) superheating of the liquid Al or a burst of the remaining solid layer of the target occurs. In both cases in the second mode the blow-off process is characterized by higher vapor pressures.

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References

  1. J. Bohandy, B.F. Kim, F.J. Adrian: J. Appl. Phys. 60, 1538 (1986)

    Google Scholar 

  2. F.J. Adrian, J. Bohandy, B.F. Kim, A.N. Jette, R. Thompson: J. Vac. Sci. Technol. B 5, 1490 (1987)

    Google Scholar 

  3. J. Bohandy, B.F. Kim, F.J. Adrian, A.N. Jette: J. Appl. Phys. 63, 1158 (1988)

    Google Scholar 

  4. E. Fogarassy, C. Fuchs, F. Kerheve, G. Hauchecorn, J. Perrière: J. Mater. Res. 4, 1082 (1989)

    Google Scholar 

  5. R.J. Baseman, J.C. Andreshak: Mat. Res. Soc. Symp. Proc. 100, 627 (1988)

    Google Scholar 

  6. M. Wagner, H.D. Geiler, D. Wolff: Measurement Science and Technol. (to be published)

  7. M. Wagner, A. Witzmann, H.D. Geiler: Appl. Surf. Sci. 43, 260 (1989)

    Google Scholar 

  8. R.J. Harrach: J. Appl. Phys. 48, 2370 (1977)

    Google Scholar 

  9. Y.S. Touloukian: Thermophysical Properties of High Temperature Solid Materials, Vol. 1: Elements (McMillan, New York 1976) pp. 7–15

    Google Scholar 

  10. Y.S. Touloukian, R.W. Powell: Thermophysical Properties of Matter (Plenum, New York 1970)

    Google Scholar 

  11. C.L. Chan, J. Mazumder: J. Appl. Phys. 62, 4579 (1987)

    Google Scholar 

  12. Landolt-Börnstein: Zahlenwerte und Funktionen aus Physik, Chemie, Astronomie, Geophysik und Technik. Eigenschaften der Materie in ihren Aggregatzuständen, 4. Teil: Kalorische Zustandsgrößen (Springer, Berlin, Heidelberg 1961)

    Google Scholar 

  13. N. Bloembergen, C.K.N. Patel et al.: Report to the American Physical Society of the Study Group on Science and Technology of directed Energy Weapons, Chapter 6: Beam Material Interactions and Lethality, Rev. Mod. Phys. 59, Part II, S119 (1987)

  14. E. Siegel: Phys. Chem. Liq. 5, 9 (1976)

    Google Scholar 

  15. C.A. Klein: AIAA J. 25, 48 (1987)

    Google Scholar 

  16. C.A. Klein, R.L. Gentilman: AIAA J. 25, 705 (1987)

    Google Scholar 

  17. C.A. Klein, R.F. Menefee, B.D. Krenck, M.J. Berry: J. Appl. Phys. 61, 1701 (1987)

    Google Scholar 

  18. D. Broer, L. Vriens: Appl. Phys. A 32, 107 (1983)

    Google Scholar 

  19. D.B. Tuckerman, A.H. Weisberg: Solid State Technol. 29, 129 (1986)

    Google Scholar 

  20. A. Fischer, V. Schultze: Thin Solid Films 182, 35 (1989)

    Google Scholar 

  21. G.E.R. Schulze: Metallphysik (Akademie, Berlin 1974) p. 432

    Google Scholar 

  22. J. D'Ans, E. Lax: Taschenbuch für Chemiker und Physiker, 2nd ed. (Springer, Berlin, Heidelberg 1949) p. 757

    Google Scholar 

  23. M. von Ardenne: Tabellen zur angewandten Physik, Bd. III (Deutscher Verlag der Wissenschaften, Berlin 1973) p. 46

    Google Scholar 

  24. J.W.M. Jacobs, J.M.G. Rikken: J. Electrochem. Soc. 134, 2690 (1987)

    Google Scholar 

  25. P.B. Barna, Z. Bodó, G. Gergely, P. Croce, J. Adám, P. Jakob: Thin Solid Films 120, 249 (1984)

    Google Scholar 

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Schultze, V., Wagner, M. Blow-off of aluminium films. Appl. Phys. A 53, 241–248 (1991). https://doi.org/10.1007/BF00324259

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  • DOI: https://doi.org/10.1007/BF00324259

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