Abstract
The electrical activity of interfacial misfit dislocations in silicon has been examined using the electron beam induced current technique (EBIC) in a scanning electron microscope. “Clean” misfit dislocations, i.e. no EBIC contrast, formed during high-temperature Si(Ge) chemical vapor epitaxy were studied. These defects were subsequently decorated with known metallic impurities (Au and Ni) by diffusion at 400° C to 1130° C from a back-side evaporated layer. Qualitative analysis of the electrical activity in relation to the energy levels anticipated for the clean or decorated dislocations is presented. Of particular interest is the case of defect-induced conductivity type inversion which occurred both at the top surface and at the buried dislocated interfaces of the multilayer. The prospects for using dislocations in a beneficial manner as active elements in electronic devices are discussed.
Similar content being viewed by others
References
H.J. Queisser: Mater. Res. Soc. Symp. Proc. 14, 323 (1983)
G.A. Rozgonyi, A.S.M. Salih, Z.J. Radzimski, R.R. Kola, J. Honeycutt: J. Crystal Growth 85, 300 (1987)
A.S.M Slih, R. Hamerski: IEEE Trans. Power Devices (1991) (to be published)
D.M. Lee, J.B., Posthill, F. Shimura, G.A. Rozgonyi: Appl. Phys. Lett. 53, 370 (1988)
M. Kittler, J. Lärz, W. Seifert, M. Seibt, W. Schröter: Appl. Phys. Lett. 58, 911 (1991)
M. Kittler: Solid State Phenomena 6 & 7, 367 (1989)
L.C. Kimmerling, H.J. Leamy, J.R. Patel: Appl. Phys. Lett. 30, 217 (1977)
T.S. Fell, P.R., Wilshaw: Inst. Phys. Conf. Ser. 104, 227 (1989)
D.K. Schroder: Semiconductor Material and Device Characterization (Wiley, New York 1990)
M. Kolbe, O. Hollricher, H. Gottschalk, H. Alexander: Inst. Phys. Conf. Ser. 100, 725 (1989)
A. Buczkowski, Z.J. Radzimski, G.A. Rozgonyi: Mater. Res. Soc. Symp. Proc. (1990)
L.J. Cheng: Mater. Res. Soc. Symp. Proc. 36, 323 (1985)
Z.J. Radzimski, C. Dube, A. Buczkowski, G.A. Rozgonyi: ECS meeting, Washington DC (May 1991)
A. Kittler, Z. Seifer: Scanning Microscopy 3, 1392 (1988)
W. Schröter, I. Queisser, J. Kronewitz: Inst. Phys. Conf. Ser. 100, 75 (1989)
J.L. Benton, L.C. Kimmerling: J. Electrochem. Soc. 129, 2098 (1982)