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Excimer laser photolysis of molybdenum hexacarbonyl with buffer gas

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Abstract

We have studied the photolysis of molybdenum hexacarbonyl by focused excimer laser radiation. It was found that electronically excited Mo atoms detected in the focus region of a KrF laser are due to a direct two photon absorption transition. The upper limit of the energy for complete dissociation of Mo(CO)6 has been derived from these results. Two photon dissociation in the gas phase should be the dominant process at metal film deposition on substrates positioned perpendicularly and near to the focus. Adding buffer gases to the organometallic vapor particle formation was observed in the whole irradiated gas volume. The analysis of scattered He-Ne laser light yields information about the density and size of these particles. Some conclusions are drawn with respect to structured metal film deposition with high spatial selectivity.

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Authors and Affiliations

  1. Central Institute of Optics and Spectroscopy, Academy of Sciences of the GDR, Rudower Chaussee 6, DDR-1199, Berlin-Adlershof, German Democratic Republic

    W. Radloff, H. Hohmann, H. -H. Ritze & R. Paul

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  1. W. Radloff
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  2. H. Hohmann
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  3. H. -H. Ritze
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  4. R. Paul
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Dedicated to Prof. Dr. Herbert Welling on the occasion of his 60th birthday

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Radloff, W., Hohmann, H., Ritze, H.H. et al. Excimer laser photolysis of molybdenum hexacarbonyl with buffer gas. Appl. Phys. B 49, 301–305 (1989). https://doi.org/10.1007/BF00324177

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  • DOI: https://doi.org/10.1007/BF00324177

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