Electron diffraction at stepped homogeneous and inhomogeneous surfaces

Abstract

Defect analysis at surfaces with LEED or RHEED have so far been essentially restricted to steps or superstructure domains. Even if there are no superstructures, variations of the scattering factor influence the spot profile. With the now available high-resolution instruments more details of the spot profile may be observed. Therefore it will be discussed how a careful study of the spot profile at different energies may be used to analyze a surface with simultaneous steps and inhomogeneities. It will be shown how the asperity height is obtained without fitting parameters and how inhomogeneities are analyzed with respect to coverage and size distribution.

This is a preview of subscription content, log in to check access.

References

  1. 1.

    J.E. Houston, R.L. Park: Surf. Sci. 21, 209 (1970)

    Google Scholar 

  2. 2.

    M. Henzler: In Festkörperprobleme (Advances in Solid State Physics), ed. by J. Treusch (Vieweg, Braunschweig 1979) p. 185

    Google Scholar 

  3. 3.

    P.R. Pukite, P.I. Cohen, S. Batra: In Reflection High-Energy Electron Diffraction and Reflection Electron Imaging of Surfaces, ed. by P.K. Larsen, P.J. Dobson (Plenum, New York 1988) p. 427

    Google Scholar 

  4. 4.

    U. Scheithauer, G. Meyer, M. Henzler: Surf. Sci. 178, 44 (1986)

    Google Scholar 

  5. 5.

    J. Wollschläger, M. Henzler: Phys. Rev. B 39, 6052 (1989)

    Google Scholar 

  6. 6.

    J. Falta, M. Horn, M. Henzler: Appl. Surf. Sci. (in press)

  7. 7.

    J.M. Cowley: Diffraction Physics (North-Holland, Amsterdam 1981)

    Google Scholar 

  8. *.

    L.J. Clarke: Surface Crystallography (Wiley, Chichester 1985)

    Google Scholar 

  9. 9.

    M. Henzler: Appl. Phys. A 34, 205 (1984)

    Google Scholar 

  10. 10.

    M. Henzler: In Dynamical Phenomena at Surfaces, Interfaces and Superlattices, ed. by F. Nizzoli, K.H. Rieder, R.F. Willis, Springer Ser. Surf. Sci. 3 (Springer, Berlin, Heidelberg 1986) p. 14

    Google Scholar 

  11. 11.

    M.G. Lagally, D.E. Savage, M.C. Trinigides: In Reflection High-Energy Electron Diffraction and Reflection Electron Imaging of Surfaces, ed. by P.K. Larsen, P.J. Dobson (Plenum, New York 1988) p. 163

    Google Scholar 

  12. 12.

    M. Horn, U. Gotter, M. Henzler: J. Vac. Sci. Technol. B 6, 727 (1988)

    Google Scholar 

  13. 13.

    R. Altsinger, H. Busch, M. Horn, M. Henzler: Surf. Sci. 200, 235 (1988)

    Google Scholar 

  14. 14.

    C.S. Lent, P.I. Cohen: Surf. Sci. 139, 121 (1984)

    Google Scholar 

  15. 15.

    H. Busch, M. Henzler: Surf. Sci. 167, 534 (1986)

    Google Scholar 

  16. 16.

    M. Henzler: Surf. Sci. 152/153, 450 (1982)

    Google Scholar 

  17. 17.

    J.M. Pimbley, T.M. Lu: J. Appl. Phys. 55, 182 (1984)

    Google Scholar 

  18. 18.

    P.R. Pukite, C.S. Lent, P.I. Cohen: Surf. Sci. 161, 39 (1985)

    Google Scholar 

  19. 19.

    G. Rasigni, F. Varnier, M. Rasigni, J.P. Palmari, A. Llebaria: Phys. Rev. B 25, 2315 (1982)

    Google Scholar 

  20. 20.

    S.M. Goodnick, D.K. Ferry, C.W. Wilmsen, Z. Liliienthal, D. Fathy, O.L. Krivanek: Phys. Rev. B 32, 8171 (1985)

    Google Scholar 

  21. 21.

    R.M. Feenstra, G.S. Oehrlein: Appl. Phys. Lett. 47, 97 (1985)

    Google Scholar 

  22. 22.

    M. Henzler: Surf. Sci. 73, 240 (1978)

    Google Scholar 

  23. 23.

    M. Presicci, T.M. Lu: Surf. Sci. 141, 233 (1984)

    Google Scholar 

  24. 24.

    J.A. Ogilvy: Rep. Prog. Phys. 50, 1553 (1987)

    Google Scholar 

  25. 25.

    M. Horn: Dissertation, University of Hannover (1988)

  26. 26.

    P. Beckmann, A. Spizzichino: The Scattering of Electromagnetic Waves from Rough Surfaces (Pergamon, Oxford 1963)

    Google Scholar 

  27. 27.

    F.G. Bass, I.M. Fuks: Wave Scattering from Statistically Rough Surfaces (Pergamon, Oxford 1979)

    Google Scholar 

  28. 28.

    G. Pietsch, M. Henzler: Appl. Surf. Sci. (in press)

  29. 29.

    T.R. Welberry: Rep. Prog. Phys. 48, 1543 (1985)

    Google Scholar 

  30. 30.

    D. Saloner, M.G. Lagally: In Structure of Surfaces, ed. by M.A. van Hove, S.Y. Tong, Springer Ser. Surf. Sci. 2 (Springer, Berlin, Heidelberg 1985)

    Google Scholar 

  31. 31.

    D.L. Kruger, D.E. Savage, M.G. Lagally: Private communication

Download references

Author information

Affiliations

Authors

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Wollschläger, J., Falta, J. & Henzler, M. Electron diffraction at stepped homogeneous and inhomogeneous surfaces. Appl. Phys. A 50, 57–68 (1990). https://doi.org/10.1007/BF00323955

Download citation

PACS

  • 61.14Hg
  • 68.35Dv