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Applied Physics A

, Volume 50, Issue 1, pp 57–68 | Cite as

Electron diffraction at stepped homogeneous and inhomogeneous surfaces

  • J. Wollschläger
  • J. Falta
  • M. Henzler
Sarfaces, Interfaces, And Layer Structures

Abstract

Defect analysis at surfaces with LEED or RHEED have so far been essentially restricted to steps or superstructure domains. Even if there are no superstructures, variations of the scattering factor influence the spot profile. With the now available high-resolution instruments more details of the spot profile may be observed. Therefore it will be discussed how a careful study of the spot profile at different energies may be used to analyze a surface with simultaneous steps and inhomogeneities. It will be shown how the asperity height is obtained without fitting parameters and how inhomogeneities are analyzed with respect to coverage and size distribution.

PACS

61.14Hg 68.35Dv 

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References

  1. 1.
    J.E. Houston, R.L. Park: Surf. Sci. 21, 209 (1970)Google Scholar
  2. 2.
    M. Henzler: In Festkörperprobleme (Advances in Solid State Physics), ed. by J. Treusch (Vieweg, Braunschweig 1979) p. 185Google Scholar
  3. 3.
    P.R. Pukite, P.I. Cohen, S. Batra: In Reflection High-Energy Electron Diffraction and Reflection Electron Imaging of Surfaces, ed. by P.K. Larsen, P.J. Dobson (Plenum, New York 1988) p. 427Google Scholar
  4. 4.
    U. Scheithauer, G. Meyer, M. Henzler: Surf. Sci. 178, 44 (1986)Google Scholar
  5. 5.
    J. Wollschläger, M. Henzler: Phys. Rev. B 39, 6052 (1989)Google Scholar
  6. 6.
    J. Falta, M. Horn, M. Henzler: Appl. Surf. Sci. (in press)Google Scholar
  7. 7.
    J.M. Cowley: Diffraction Physics (North-Holland, Amsterdam 1981)Google Scholar
  8. *.
    L.J. Clarke: Surface Crystallography (Wiley, Chichester 1985)Google Scholar
  9. 9.
    M. Henzler: Appl. Phys. A 34, 205 (1984)Google Scholar
  10. 10.
    M. Henzler: In Dynamical Phenomena at Surfaces, Interfaces and Superlattices, ed. by F. Nizzoli, K.H. Rieder, R.F. Willis, Springer Ser. Surf. Sci. 3 (Springer, Berlin, Heidelberg 1986) p. 14Google Scholar
  11. 11.
    M.G. Lagally, D.E. Savage, M.C. Trinigides: In Reflection High-Energy Electron Diffraction and Reflection Electron Imaging of Surfaces, ed. by P.K. Larsen, P.J. Dobson (Plenum, New York 1988) p. 163Google Scholar
  12. 12.
    M. Horn, U. Gotter, M. Henzler: J. Vac. Sci. Technol. B 6, 727 (1988)Google Scholar
  13. 13.
    R. Altsinger, H. Busch, M. Horn, M. Henzler: Surf. Sci. 200, 235 (1988)Google Scholar
  14. 14.
    C.S. Lent, P.I. Cohen: Surf. Sci. 139, 121 (1984)Google Scholar
  15. 15.
    H. Busch, M. Henzler: Surf. Sci. 167, 534 (1986)Google Scholar
  16. 16.
    M. Henzler: Surf. Sci. 152/153, 450 (1982)Google Scholar
  17. 17.
    J.M. Pimbley, T.M. Lu: J. Appl. Phys. 55, 182 (1984)Google Scholar
  18. 18.
    P.R. Pukite, C.S. Lent, P.I. Cohen: Surf. Sci. 161, 39 (1985)Google Scholar
  19. 19.
    G. Rasigni, F. Varnier, M. Rasigni, J.P. Palmari, A. Llebaria: Phys. Rev. B 25, 2315 (1982)Google Scholar
  20. 20.
    S.M. Goodnick, D.K. Ferry, C.W. Wilmsen, Z. Liliienthal, D. Fathy, O.L. Krivanek: Phys. Rev. B 32, 8171 (1985)Google Scholar
  21. 21.
    R.M. Feenstra, G.S. Oehrlein: Appl. Phys. Lett. 47, 97 (1985)Google Scholar
  22. 22.
    M. Henzler: Surf. Sci. 73, 240 (1978)Google Scholar
  23. 23.
    M. Presicci, T.M. Lu: Surf. Sci. 141, 233 (1984)Google Scholar
  24. 24.
    J.A. Ogilvy: Rep. Prog. Phys. 50, 1553 (1987)Google Scholar
  25. 25.
    M. Horn: Dissertation, University of Hannover (1988)Google Scholar
  26. 26.
    P. Beckmann, A. Spizzichino: The Scattering of Electromagnetic Waves from Rough Surfaces (Pergamon, Oxford 1963)Google Scholar
  27. 27.
    F.G. Bass, I.M. Fuks: Wave Scattering from Statistically Rough Surfaces (Pergamon, Oxford 1979)Google Scholar
  28. 28.
    G. Pietsch, M. Henzler: Appl. Surf. Sci. (in press)Google Scholar
  29. 29.
    T.R. Welberry: Rep. Prog. Phys. 48, 1543 (1985)Google Scholar
  30. 30.
    D. Saloner, M.G. Lagally: In Structure of Surfaces, ed. by M.A. van Hove, S.Y. Tong, Springer Ser. Surf. Sci. 2 (Springer, Berlin, Heidelberg 1985)Google Scholar
  31. 31.
    D.L. Kruger, D.E. Savage, M.G. Lagally: Private communicationGoogle Scholar

Copyright information

© Springer-Verlag 1990

Authors and Affiliations

  • J. Wollschläger
    • 1
  • J. Falta
    • 1
  • M. Henzler
    • 1
  1. 1.Institut für FestkörperphysikUniversitätHannover 1Fed. Rep. Germany

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