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Direct laser ablation of sub-100 nm line structures into polyimide

  • Surfaces And Multilayers
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Abstract

Periodic line structures with a period of 167 nm and linewidths varying from 30 to 100 nm have been produced in polyimide by direct ablation with a KrF laser using an interferometric technique. The characteristics of this interferometer as it applies to the ablation of these line structures, including linewidth and alignment sensitivity, are analyzed. The ability to control the linewidth by varying the average incident fluence is described theoretically and demonstrated experimentally. This externally generated period of 167 nm also prevents the spontaneous growth of laser induced periodic surface structures (LIPSS).

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Author notes

  1. R. Sauerbrey

    Present address: Max-Planck-Institut für biophysikalische Chemie, Am Fassberg, W-3400, Göttingen, Fed. Rep. Germany

Authors and Affiliations

  1. Departments of Electrical & Computer Engineering and Material Science and the Rice Quantum Institute, Rice University, P.O. Box 1892, 77251, Houston, TX, USA

    H. M. Phillips, D. L. Callahan & R. Sauerbrey

  2. Department of Optics and Quantum Electronics, JATE University, Szeged, Hungary

    G. Szabo & Z. Bor

Authors
  1. H. M. Phillips
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  2. D. L. Callahan
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  3. R. Sauerbrey
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  4. G. Szabo
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  5. Z. Bor
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Phillips, H.M., Callahan, D.L., Sauerbrey, R. et al. Direct laser ablation of sub-100 nm line structures into polyimide. Appl. Phys. A 54, 158–165 (1992). https://doi.org/10.1007/BF00323903

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  • DOI: https://doi.org/10.1007/BF00323903

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