Skip to main content
SpringerLink
Log in

Incorporation of nitrogen into amorphous-hydrogenated carbon (diamond-like) films

  • Surfaces And Multilayers
  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

Nitrogen-doped amorphous hydrogenated carbon films (a-C:H) were prepared by mixing nitrogen gas and benzene during dc plasma discharge deposition. The growth rate of the film decreases strongly with increasing nitrogen content in the mixture. The nitrogen concentration in the films was determined by nuclear reaction analysis (NRA) and Auger electron spectroscopy (AES) using suitable calibration samples. The results of AES measurements are generally consistent with NRA values. Nitrogen incorporation in the a-C:H films shows pronounced doping effects as reflected in their optical and electrical properties.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. S. Aisenberg: J. Vac. Sci. Technol. A 2, 369 (1984)

    Google Scholar 

  2. B. Meyerson, F.W. Smith: Solid State Commun. 34, 531 (1980)

    Google Scholar 

  3. D.I. Jones, A.D. Stewart: Philos. Mag. B 46, 423 (1982)

    Google Scholar 

  4. H.X. Han, B.J. Feldman: Solid State Commun. 65, 921 (1988)

    Google Scholar 

  5. J.H. Kaufman, S. Metin, D.D. Saperstein: Phys. Rev. B 39, 13053 (1989)

    Google Scholar 

  6. J.W. Mayer, E. Rimini (eds.): Ion Beam Handbook for Material Analysis (Academic, New York 1977)

    Google Scholar 

  7. J.F. Ziegler, J.P. Biersack, M. Littmark: The Stopping and Ranges of Ions in Matter (Pergamon, New York 1985)

    Google Scholar 

  8. R.W. Fearick: Private communication

  9. D. Briggs, M.P. Seah (eds.): Practical Surface Analysis by Auger and X-ray Photoelectron Spectroscopy (Wiley, Chichester 1983)

    Google Scholar 

  10. L.E. Davis, N.C. MacDonald, P.W. Palmberg, G.E. Riach, R.E. Weber: Handbook of Auger Electron Spectroscopy (Physical Electronics Industries, Minnesota 1978)

    Google Scholar 

  11. O. Amir, R. Kalish: To be published

Download references

Author information

Authors and Affiliations

  1. Solid State Institute and Physics Department, Technion-Israel Institute of Technology, 32000, Haifa, Israel

    R. Kalish, O. Amir & R. Brener

  2. Schonland Research Centre, University of the Witwatersrand, P.O. Wits, 2050, South Africa

    R. A. Spits & T. E. Derry

Authors
  1. R. Kalish
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. O. Amir
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. R. Brener
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. R. A. Spits
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. T. E. Derry
    View author publications

    You can also search for this author in PubMed Google Scholar

Additional information

Dedicated to Professor J. P. F. Sellschop for his 60th birthday

Rights and permissions

Reprints and permissions

About this article

Cite this article

Kalish, R., Amir, O., Brener, R. et al. Incorporation of nitrogen into amorphous-hydrogenated carbon (diamond-like) films. Appl. Phys. A 52, 48–51 (1991). https://doi.org/10.1007/BF00323683

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00323683

PACS

Search

Navigation