TEM investigations on PECVD-titanium carbide layers

Abstract

TiC_x-PECVD-layers were characterized by TEM. EDX analysis and electron diffraction. TiC_x-layers deposited using benzene showed a columnar structure, at which the column size decreases with rising excess carbon content. TiC_x-layers deposited using n-heptane presented a lamellar structure, at which the lamellar thickness diminishes with an increasing excess carbon content. In dependence on the layer thickness a periodic progress of the element contents was observed, at which a maximum for Ti and Cl correlates with a minimum for C. It was found that the incorporated chlorine is bonded to titanium. The lattice parameter depends on the chlorine content. Using TiCl₄/H₂/Ar-gas mixtures without any hydrocarbon, layers containing TiH₂ are formed.