Abstract
A reactive ionized cluster beam technique (RICB) which was composed of a conventional ICB source and a radical beam source has been used to deposit stable and metastable polycrystalline AlNx (0≤x≤1) films. Using in-situ high energy electron diffraction (HEED) at grazing incidence geometry, crystallographic properties such as structure, preferred orientation and interplanar dspacing values were determined and the relation to deposition parameters investigated. It could be shown that the simultaneous use of the ICB technique and a radical beam source to separately control the kinetic energy of the Al ions and the dissociation rate of molecular nitrogen, allows AlN films to be deposited with variable composition and crystal structures. In-situ HEED used in the transmission mode is an effective tool to investigate the crystallography of growing compound films such as AlNx.
Similar content being viewed by others
References
Koshinaka M, Fujii H, Nakanishi K, Shibuya Y (1987) Proc 11th Symp on ISIAT'87, Tokyo, p 361–364
von Richthofen A, Matsuo M, Karduck P, Ammann N, Combined EPMA and AES Depth Profiling of a Multilayer Ti-Al-O-N Coating, 3rd European Workshop on Modern Developments and Applications in Microbeam Analysis 9–13 May 1993 in Rimini, Italy, Mikrochim Acta (Supp.) (to be published)
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
von Richthofen, A., Neuschütz, D. In-situ HEED structure analysis of AlNx films grown by the simultaneous use of a radical beam source and ICB technique. Fresenius J Anal Chem 349, 136–139 (1994). https://doi.org/10.1007/BF00323237
Received:
Issue Date:
DOI: https://doi.org/10.1007/BF00323237