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Fresenius' Journal of Analytical Chemistry

, Volume 353, Issue 5–8, pp 582–584 | Cite as

Quantitative elastic recoil detection (ERD)

  • A. Bergmaier
  • G. Dollinger
  • C. M. Frey
  • T. Faestermann
Poster Sessions Development Of Apparatus

Abstract

Elastic recoil detection with heavy ions is a well suited method to measure depth profiles of light and medium heavy elements in thin films. Due to known Rutherford scattering cross sections and stopping powers of ions in matter, measurements can be quantified with an accuracy of about 1%. The transformation of energy spectra to quantitative elemental depth profiles, however, is generally a non trivial task and therefore a transofrmation algorithm has been developed based on a similar one for RBS analysis and realised in the program KONZERD. The transformation procedure allows a fast conversion from raw spectra to concentration profiles for classical ERD measurements as well as for high resolution measurements with a depth resolution better than 1 nm.

Keywords

Thin Film High Resolution Energy Spectrum Concentration Profile Depth Profile 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    Dollinger G, Faestermann T, Maier-Komor P (1992) Nucl Instr Meth B 64:422Google Scholar
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    Dollinger G, Faestermann T, Frey CM, Bergmaier A, Schwabedissen E, Fischer T, Schwarz R (1994) Nucl Instr Meth B 85:786Google Scholar
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    Børgesen P, Behrisch R, Scherzer BMU (1982) Appl Phys A 27:183Google Scholar
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    Bergmaier A, Dollinger G, Faestermann T, Frey CM, Dworschak W, Ehrhardt H (1995) Diamond Relat Mater 4:478Google Scholar

Copyright information

© Springer-Verlag 1995

Authors and Affiliations

  • A. Bergmaier
    • 1
  • G. Dollinger
    • 1
  • C. M. Frey
    • 1
  • T. Faestermann
    • 1
  1. 1.Physik-Department E12Technische Universität MünchenGarchingGermany

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