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The mesoscopic characterization of the microhardness of superhard films of TaN, TaC and Ta(N,C)

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Journal of Materials Science Letters

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Authors and Affiliations

  1. Institute of Materials Science, Jilin University, 130 023, Changchun, People's Republic of China

    Teng Feng-En, Mei Xian-Xiu, Wang Chun-Zhong, Shan Feng-Lan & Wang Yu-Ming

  2. Department of Materials Science and Engineering, Dalian University of Technology, 116024, Dalian, People's Republic of China

    Zhang Qing-Yu & Yang Da-Zhi

Authors
  1. Teng Feng-En
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  2. Mei Xian-Xiu
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  3. Zhang Qing-Yu
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  4. Wang Chun-Zhong
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  5. Shan Feng-Lan
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  6. Yang Da-Zhi
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  7. Wang Yu-Ming
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Feng-En, T., Xian-Xiu, M., Qing-Yu, Z. et al. The mesoscopic characterization of the microhardness of superhard films of TaN, TaC and Ta(N,C). J Mater Sci Lett 15, 1601–1604 (1996). https://doi.org/10.1007/BF00278102

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  • DOI: https://doi.org/10.1007/BF00278102

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