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Preparation of ZnO films on sapphire (01\(\bar 1\)2) substrates by low-pressure organometallic chemical vapour deposition

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Authors and Affiliations

  1. Faculty of Engineering, Ehime University, 3 Bunkyo-cho, 790, Matsuyama, Japan

    K. Kobayasm, T. Matsubara, S. Matsushima, S. Shirakata, S. Isomura & G. Okada

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  1. K. Kobayasm
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  2. T. Matsubara
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  3. S. Matsushima
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  4. S. Shirakata
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  5. S. Isomura
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  6. G. Okada
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Kobayasm, K., Matsubara, T., Matsushima, S. et al. Preparation of ZnO films on sapphire (01\(\bar 1\)2) substrates by low-pressure organometallic chemical vapour deposition. J Mater Sci Lett 15, 457–459 (1996). https://doi.org/10.1007/BF00277198

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  • DOI: https://doi.org/10.1007/BF00277198

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