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Infrared study of structural changes in silicon oxynitride films

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Authors and Affiliations

  1. Rudger Boskovic Institute, PO Box 1016, 41000, Zagreb, Croatia

    B. Pivac

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  1. B. Pivac
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Pivac, B. Infrared study of structural changes in silicon oxynitride films. J Mater Sci Lett 12, 23–26 (1993). https://doi.org/10.1007/BF00275460

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  • DOI: https://doi.org/10.1007/BF00275460

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