Skip to main content
SpringerLink
Log in

High resolution electron microscopy study of nickel silicide — silicon interface grown by molecular beam epitaxy

  • Published:
Journal of Materials Science Letters

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

References

  1. S.Saitoh, H.Ishiwara and S.Furukawa, Appl. Phys. Lett. 37 (1980) 203.

    Google Scholar 

  2. J. M.Gibson, R. T.Tung, J. M.Phylips and J. M.Poate, Mater. Res. Soc. Symp. Proc. 25 (1984) 405.

    Google Scholar 

  3. H.VonKanel, T.Graf, J.Henz, M.Ospelt and P.Wathter, J. Crystal Growth 81 (1987) 470.

    Google Scholar 

  4. G.Akinci, T. R.Ohno and E. D.Williams, Sruf. Sci. 193 (1988) 534.

    Google Scholar 

  5. E. J.VanLoenen, J. F.Van delVeen and F. K.Legoues, ibid. 157 (1985) 1.

    Google Scholar 

  6. D.Cherns, G. R.Anstis, J. L.Hutchison and J. c. H.Spence, Philos. Mag. A46 (1982) 849.

    Google Scholar 

  7. F.Foll, P. S.Ho and K. N.Tu, J. Appl. Phys. 52 (1981) 250.

    Google Scholar 

  8. G.Ottaviani, J. Vac. Sci. Technol. 16 (1979) 1112.

    Google Scholar 

  9. R. T.Tung, J. M.Gibson and J. M.Poate, Mater. Res. Soc. Symp. Proc. 25 (1983) 435.

    Google Scholar 

  10. J. L.Erskine and Yu-JengCheng, Mater. Res. Sco. Symp. Proc. 25 (1984) 352.

    Google Scholar 

  11. X. H.Wu, Z. Q.Wu, O. P.Pqelacov and M. A.Lamin, J. Mater: Sci. Lett. 12 (1993) 1330.

    Google Scholar 

  12. D.Cherns, D. A.Smith, W.Krakow and P. E.Baton, Philos. Mag. A45 (1982) 107.

    Google Scholar 

Download references

Author information

Author notes

  1. Y. Z. Feng

    Present address: Materials Department, University of California, CA, Santa Barbara, 93106, USA

Authors and Affiliations

  1. Fundamental Physics Center, University of Science and Technology of China, 230026, Hefei, People's Republic of China

    Y. Z. Feng & Z. Q. Wu

Authors
  1. Y. Z. Feng
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Z. Q. Wu
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Feng, Y.Z., Wu, Z.Q. High resolution electron microscopy study of nickel silicide — silicon interface grown by molecular beam epitaxy. J Mater Sci Lett 15, 2000–2001 (1996). https://doi.org/10.1007/BF00274361

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00274361

Keywords

Search

Navigation