Skip to main content
Log in

Nitridation of silicon under high carbon activity

  • Published:
Journal of Materials Science Letters

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

References

  1. H. M.Jennings, J. Mater. Sci. 18 (1983) 951.

    Google Scholar 

  2. H. M.Jennings, B. J.Dalgleish and P. L.Pratt, ibid. 23 (1988) 2573.

    Google Scholar 

  3. H. M.Jennings and M. H.Richman, ibid. 11 (1976) 2087.

    Google Scholar 

  4. J. A.Mangels and G. J.Tennenhouse, Amer. Ceram. Soc. Bull. 60 (1981) 1306.

    Google Scholar 

  5. J.Rakshit and J.Mukerji, Bull. Mater. Sci. 13 (1990) 259.

    Google Scholar 

  6. R. M.Williams and A.Ezis, Amer. Ceram. Soc. Bull. 62 (1983) 607.

    Google Scholar 

  7. A.Atkinson, A. J.Moulson and E. W.Roberts, J. Amer. Ceram. Soc. 59 (1976) 285.

    Google Scholar 

  8. J. A.Mangels, Amer. Ceram. Soc. Bull. 60 (1981) 613.

    Google Scholar 

  9. A. Atkinson and A. J. Moulson, in “Science of Ceramics”, Vol. 8, (The British Ceramic Society, 1976), p. 111.

  10. R. Ramachandra Rao, H. N. Roopa and T. S. Kannan, PDMT 9328, PDMT9329, PDMT9330, (1993), Project Documents, Materials Science Division, NAL, Bangalore, India.

  11. O.Unal, F. C.Laabs and S. M.Lane, J Mater. Sci. Lett. 14 (1995) 63.

    Google Scholar 

  12. G.Eriksson, Chem. Scr 8 (1975) 100.

    Google Scholar 

  13. H.Wada, M. J.Wang and T. Y.Tien, J. Amer. Ceram. Soc. 71 (1988) 837.

    Google Scholar 

  14. J.Barta and M.Manela, Mater. Sci. Engng. 71 (1985) 265.

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

Ramachandra Rao, R., Roopa, H.N. & Kannan, T.S. Nitridation of silicon under high carbon activity. J Mater Sci Lett 15, 1956–1959 (1996). https://doi.org/10.1007/BF00274348

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00274348

Keywords

Navigation