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The effects of hysteresis curves of glass-passivated MOS capacitors exposed to water vapour

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Journal of Materials Science Letters

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References

  1. K. H. Hurley; Solid State Technol. March (1987) 103.

  2. J. E.Dickinson Jr. and B. H. W. S.Dejong, J. Noncryst. Solids 102 (1988) 196.

    Google Scholar 

  3. N. f.Raley and D. l.Losee, J. Electrochem. Soc. 135 (1988) 2640.

    Google Scholar 

  4. G. l.Schnable, A. w.Fisher and J. m.Shaw, ibid. 135 (1990) 3973.

    Google Scholar 

  5. K.Kobayashi, J. Non-cryst. Solids 88 (1986) 229.

    Google Scholar 

  6. K. Kobayashi, J. Non-cryst. Solids 176 (1994) 208.

    Google Scholar 

  7. K.Kobayashi, J Electrochem. Soc. 131 (1984) 2190.

    Google Scholar 

  8. S.Rojas, R.Gomarasca, Zanotti, A.Sassela, L.Moro and P.Lazzeri, J. Vac. Sci. Technol. B 10 (1992) 633.

    Google Scholar 

  9. S. c.Li, S. p.Murarka, X. s.Guo and W. a.Landford, J Appl. Phys. 72 (1992) 2947.

    Google Scholar 

  10. K.Kobayashi, J. Non-cryst. Solids 124 (1990) 229.

    Google Scholar 

  11. C. m.Shaw and J. e.Shelby, Phys. Chem. Glasses 34 (1993) 35.

    Google Scholar 

  12. K.Kobayashi, Glass Technol. 34 (1993) 120.

    Google Scholar 

  13. J. a.Ruller and J. e.Shelby, Phys. Chem. Glasses 33 (1992) 177.

    Google Scholar 

  14. A.Naruse, “Garasukogaku” (Kyoritsu Shuppan, Tokyo, 1959) p. 304.

    Google Scholar 

  15. L.Zhenhua and G. h.Frischat, J. Non-cryst. Solids 163 (1993) 169.

    Google Scholar 

Download references

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  1. Toshiba ULSI Research Center, 1-Komukai Toshibacho, Kawasaki, Japan

    K. Kobayashi

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  1. K. Kobayashi
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Kobayashi, K. The effects of hysteresis curves of glass-passivated MOS capacitors exposed to water vapour. J Mater Sci Lett 15, 1905–1907 (1996). https://doi.org/10.1007/BF00264092

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  • DOI: https://doi.org/10.1007/BF00264092

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