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Vacuum ultraviolet, ultraviolet and visible absorption spectra study of hydrogenated amorphous carbon films prepared by RF plasma chemical vapour deposition

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Authors and Affiliations

  1. R&D Center, TDK Corporation, 2-15-7 Higashi-Ohwada, 272, Ichikawa City, Chiba, Japan

    M. Nakayama & M. Shibahara

  2. Department of Chemistry, Nagaoka University of Technology, 940-21, Nagaoka, Niigata, Japan

    K. Maruyama & K. Kamata

Authors
  1. M. Nakayama
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  2. M. Shibahara
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  3. K. Maruyama
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  4. K. Kamata
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Nakayama, M., Shibahara, M., Maruyama, K. et al. Vacuum ultraviolet, ultraviolet and visible absorption spectra study of hydrogenated amorphous carbon films prepared by RF plasma chemical vapour deposition. J Mater Sci Lett 12, 1380–1382 (1993). https://doi.org/10.1007/BF00241715

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  • DOI: https://doi.org/10.1007/BF00241715

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