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Physisorption of krypton on thermally oxidized silicon wafers

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Journal of Materials Science Letters

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Bohra, J.N., John, P.T. & Saxena, R.K. Physisorption of krypton on thermally oxidized silicon wafers. J Mater Sci Lett 12, 1362–1364 (1993). https://doi.org/10.1007/BF00241709

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  • DOI: https://doi.org/10.1007/BF00241709

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