Skip to main content
SpringerLink
Log in

A multi-technique study of the surface preparation of InSb substrate and subsequently grown CdTe films by molecular beam epitaxy

  • Papers
  • Published:
Journal of Materials Science: Materials in Electronics Aims and scope Submit manuscript

Abstract

Surface preparation and ion bombardment cleaning of (0 0 1) InSb substrates prior to molecular beam epitaxy (MBE) of CdTe films were studied by the combination of various characterization techniques, including X-ray double crystal rocking curves, photoluminescence, Raman scattering and scanning electron microscopy, for different ion bombardment conditions. The optimum substrate preparation conditions of ion bombardment cleaning time and temperature were obtained. The effects of ion beam cleaning on the quality of subsequent MBE CdTe films and the significant divergence among the different assessments are discussed.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. R. F. C. FARROW, G. R. JONES, G. W. WILLIAMS and I. M. YOUNG, Appl. Phys. Lett. 39 (1981) 954.

    Google Scholar 

  2. S. WOOD, J. GREGGI JR, R. F. C. FARROW, F. A. SHIRLAND and A. J. NOREIKA, J. Appl. Phys. 55 (1984) 4225.

    Google Scholar 

  3. N. C. GILES-TAYLOR, R. N. BICKNELL, D. N. BLANKS, T. H. MYERS and J. F. SCHETZINA, J. Vac. Sci. Technol. A 3 (1985) 76.

    Google Scholar 

  4. Z. C. FENG, A. MASCARENHAS and W. J. CHOYKE, J. Lumin. 35 (1986) 329.

    Google Scholar 

  5. W. J. CHOYKE, M. G. BURKE,Z. C. FENG, M. H. HANES and A. MASCARENHAS, Mater. Sci. Forum 10–12 (1986) 769.

    Google Scholar 

  6. M. G. BURKE, W. J. CHOYKE, N. J. DOYLE, Z. C. FENG, M. H. HANES and A. MASCARENHAS, Mater. Res. Soc. Symp. Proc. 77 (1987) 615.

    Google Scholar 

  7. D. R. T. ZAHN, K. J. MACKEY, R. H. WILLIAMS, H. MÜNDER, J. GEURTS and W. RICHTER, Appl. Phys. Lett. 50 (1987) 742.

    Google Scholar 

  8. Z. C. FENG, M. J. BEVAN, W. J. CHOYKE and S. V. KRISHNASWAMY, J. Appl. Phys. 64 (1988) 2595.

    Google Scholar 

  9. T. D. GODING, J. STROZIER, G. M. WILLIAMS, A. G. CULLIS, C. R. WHITEHOUSE, J. H. DINAN and D. ZAHN, Mater. Res. Soc. Symp. Proc. 221 (1991) 311.

    Google Scholar 

  10. T. W. KIM, M. JUNG, H. L. PARK, H. K. NA and J. S. KIM, Appl. Phys. Lett. 61 (1992) 1101.

    Google Scholar 

  11. D. HULL, Introduction to dislocations (Pergamon Press, Oxford, 1975) Chs 2 and 5.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Physics, National University of Singapore, 0511, Singapore

    Z. C. Feng

  2. EMCORE Corporation, 08873, Somerset, NJ, USA

    Z. C. Feng

  3. Department of Physics, National University of Singapore, 0511, Singapore

    H. Gong

  4. Department of Physics and Astronomy, University of Pittsburgh, 15260, Pittsburgh, PA, USA

    W. J. Choyke

  5. Westinghouse Science and Technology Center, 15235, Pittsburgh, PA, USA

    N. J. Doyle

  6. IBM Almaden Research Center, 95120, San Jose, CA, USA

    R. F. C. Farrow

Authors
  1. Z. C. Feng
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. H. Gong
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. W. J. Choyke
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. N. J. Doyle
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. R. F. C. Farrow
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Feng, Z.C., Gong, H., Choyke, W.J. et al. A multi-technique study of the surface preparation of InSb substrate and subsequently grown CdTe films by molecular beam epitaxy. J Mater Sci: Mater Electron 7, 23–26 (1996). https://doi.org/10.1007/BF00194088

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00194088

Keywords

Search

Navigation