Abstract
The reliability of the relative sensitivity factor (RSF) approach for secondary ion mass spectrometry (SIMS) quantification of the leached layers on glass was investigated by measuring comparable samples of glass with SIMS and RBS (Rutherford backscattering spectrometry). The RSF factors were calculated using the nominal bulk compositions. Accurate results can be obtained only when the leached layer and the bulk glass have the same major elemental compositions (Si and O) and the matrix effect is inhibited. The concentrations of the different elements in the leached layer obtained from the comparable samples measured by SIMS and RBS are coincident within a factor of 2
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This paper is a part of a thesis submitted in partial fulfilment of the requirements for the PhD degree at the University of Technology of Vienna, 1991. The paper was orally presented in a symposium, “Analysis of Working Materials”, held in Vienna, 22–29 May 1991.
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Salem, A.A., Stingeder, G., Grasserbauer, M. et al. SIMS and RBS analysis of leached glass: Reliability of RSF method for SIMS quantification. J Mater Sci: Mater Electron 7, 373–379 (1996). https://doi.org/10.1007/BF00180772
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DOI: https://doi.org/10.1007/BF00180772