Nb3Si films with the A-15 structure have been prepared by sputtering onto a substrate whose temperature is about 1000 ‡C, followed by quenching to liquid nitrogen temperature. All processes were carried out by using magnetron sputtering in a container full of liquid nitrogen. The quenching just after the deposition was achieved by thermal conduction using a sample holder in contact with the liquid nitrogen container. The highest onset temperature T on and critical temperature (midpoint of the transition) T c of the samples are 17.3 and 16.4 K, respectively, with a sharp transition. X-ray diffraction patterns show fine-grained A-15 structure and give a lattice constant of 5.09 Å.
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Work supported in part by a Grant-in-Aid for Scientific Research from the Ministry of Education.
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Ōgushi, T., Nishi, K., Nagai, H. et al. Nb3Si prepared by high-rate sputtering followed by quenching. J Low Temp Phys 41, 13–23 (1980). https://doi.org/10.1007/BF00117226
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DOI: https://doi.org/10.1007/BF00117226