Advertisement

No-Load Control Method of LLC Resonant Converter for Plasma Sputtering Process Using Full-Bridge Structure

  • Min-Jun Kwon
  • Woo-Cheol LeeEmail author
Original Article
  • 1 Downloads

Abstract

This paper describes a no-load control method of an LLC resonant converter for a plasma sputtering process using a full-bridge structure. Initially, the plasma sputtering process needs to operate under a no-load condition to produce a plasma. The operation characteristics of an LLC resonant converter obtained by the conventional analysis are different from the actual no-load condition. Therefore, the no-load characteristics of an LLC resonant converter must be analyzed and the control method of the no-load condition must be studied. In this paper, the no-load characteristic of an LLC resonant converter was analyzed considering the parasitic component. It also described a method for controlling an LLC resonant converter via the full-bridge structure in a no-load condition. The analysis and control operation were confirmed through simulation and experiment.

Keywords

LLC resonant converter Plasma process Full-bridge No-load condition 

Notes

Acknowledgements

This research was supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education (no. NRF-2017R1D1A1B03031532).

References

  1. 1.
    Somkhunthot W (2007) Bipolar pulsed-DC power supply for magnetron sputtering and thin films synthesis. Electr J Electr Eng 9(2):20–26Google Scholar
  2. 2.
    Belkind A, Freilich A, Lopez J, Zhao Z, Zhu W, Becker K (2005) Characterization of pulsed dc magnetron puttering plasmas. New J Phys 7(1):90CrossRefGoogle Scholar
  3. 3.
    Yang B, Lee FC, Zhabg AJ, Huang G (2002) LLC resonant converter for front end DC/DC conversion. In: Proceedings of IEEE APEC’02, pp 1108–1112Google Scholar
  4. 4.
    Canales F, Barbosa P, Lee FC (2002) A wide input voltage and load output variations fixed-frequency ZVS DC/DC LLC resonant converter for high-power applications. In: Conference record industry applications 2002, 13–18 October 2002, vol 4, pp 2306–2313Google Scholar
  5. 5.
    Park CH, Cho SH, Jang JH, Pidaparthy SK, Ahn TY, Choi BC (2014) Average current mode control for LLC series resonant DC-to-DC converters. J Power Electron 14(1):40–47CrossRefGoogle Scholar
  6. 6.
    Park HP, Jung JH (2016) “Modeling and feedback control of LLC resonant converters at high switching frequency. J Power Electron 16(3):849–860CrossRefGoogle Scholar
  7. 7.
    Lu B, Liu W, Liang Y, Lee FC, Van Wyk JD (2006) Optimal design methodology for LLC resonant converter. In: Proceedings of IEEE APEC’06, pp 533–538Google Scholar
  8. 8.
    Duerbaum T (1998) First harmonic approximation including design constraints. In: Proceedings of INTELEC’98, October 1998, pp 321–328Google Scholar
  9. 9.
    De Simone S, Adragna C, Spini C, Gattavari G (2006) Design-oriented steady state analysis of LLC resonant converters based on FHA. In: Proceedings of international symposium on power electronics, electrical drives, automation and motion 2006, pp 16–23Google Scholar
  10. 10.
    Lee HK, Kim ES, Huh DY, Lee GS, Chung BG, Kang SI (2006) Operating characteristics of LLC series resonant converter using a LLT transformer. Trans Korea Inst Power Electron 11(5):409–416Google Scholar
  11. 11.
    Pledl G, Tauer M, Buecherl D (2010) Theory of operation, design procedure and simulation of a bidirectional LLC resonant converter for vehicular applications. In: Proceedings of IEEE vehicle power propulsion conference, September 2010, pp 1–5Google Scholar
  12. 12.
    Choi HS (2007) Design consideration of half-bridge LLC resonant converter. J Power Electron 7(1):13–20Google Scholar
  13. 13.
    Lee BH, Kim MY, Kim CE, Park KB, Moon GW (2009) Analysis of LLC resonant converter considering effect of parasitic components. In: Proceedings of INTELEC’09, October 2009, pp 1–6Google Scholar
  14. 14.
    Zheng K, Zhou D, Li J, Li L, Zhao Y (2016) A digital self-sustained phase shift modulation control strategy for full-bridge LLC resonant converters. J Power Electron 16(6):915–924CrossRefGoogle Scholar

Copyright information

© The Korean Institute of Electrical Engineers 2019

Authors and Affiliations

  1. 1.Department of Electrical, Electronic and Control Engineering, Institute for Information Technology ConvergenceHankyong National UniversityAnseongKorea

Personalised recommendations