No-Load Control Method of LLC Resonant Converter for Plasma Sputtering Process Using Full-Bridge Structure
- 1 Downloads
This paper describes a no-load control method of an LLC resonant converter for a plasma sputtering process using a full-bridge structure. Initially, the plasma sputtering process needs to operate under a no-load condition to produce a plasma. The operation characteristics of an LLC resonant converter obtained by the conventional analysis are different from the actual no-load condition. Therefore, the no-load characteristics of an LLC resonant converter must be analyzed and the control method of the no-load condition must be studied. In this paper, the no-load characteristic of an LLC resonant converter was analyzed considering the parasitic component. It also described a method for controlling an LLC resonant converter via the full-bridge structure in a no-load condition. The analysis and control operation were confirmed through simulation and experiment.
KeywordsLLC resonant converter Plasma process Full-bridge No-load condition
This research was supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education (no. NRF-2017R1D1A1B03031532).
- 1.Somkhunthot W (2007) Bipolar pulsed-DC power supply for magnetron sputtering and thin films synthesis. Electr J Electr Eng 9(2):20–26Google Scholar
- 3.Yang B, Lee FC, Zhabg AJ, Huang G (2002) LLC resonant converter for front end DC/DC conversion. In: Proceedings of IEEE APEC’02, pp 1108–1112Google Scholar
- 4.Canales F, Barbosa P, Lee FC (2002) A wide input voltage and load output variations fixed-frequency ZVS DC/DC LLC resonant converter for high-power applications. In: Conference record industry applications 2002, 13–18 October 2002, vol 4, pp 2306–2313Google Scholar
- 7.Lu B, Liu W, Liang Y, Lee FC, Van Wyk JD (2006) Optimal design methodology for LLC resonant converter. In: Proceedings of IEEE APEC’06, pp 533–538Google Scholar
- 8.Duerbaum T (1998) First harmonic approximation including design constraints. In: Proceedings of INTELEC’98, October 1998, pp 321–328Google Scholar
- 9.De Simone S, Adragna C, Spini C, Gattavari G (2006) Design-oriented steady state analysis of LLC resonant converters based on FHA. In: Proceedings of international symposium on power electronics, electrical drives, automation and motion 2006, pp 16–23Google Scholar
- 10.Lee HK, Kim ES, Huh DY, Lee GS, Chung BG, Kang SI (2006) Operating characteristics of LLC series resonant converter using a LLT transformer. Trans Korea Inst Power Electron 11(5):409–416Google Scholar
- 11.Pledl G, Tauer M, Buecherl D (2010) Theory of operation, design procedure and simulation of a bidirectional LLC resonant converter for vehicular applications. In: Proceedings of IEEE vehicle power propulsion conference, September 2010, pp 1–5Google Scholar
- 12.Choi HS (2007) Design consideration of half-bridge LLC resonant converter. J Power Electron 7(1):13–20Google Scholar
- 13.Lee BH, Kim MY, Kim CE, Park KB, Moon GW (2009) Analysis of LLC resonant converter considering effect of parasitic components. In: Proceedings of INTELEC’09, October 2009, pp 1–6Google Scholar