Science China Materials

, Volume 60, Issue 9, pp 793–810 | Cite as

Design and tailoring of patterned ZnO nanostructures for energy conversion applications

  • Haonan Si (司浩楠)
  • Zhuo Kang (康卓)
  • Qingliang Liao (廖庆亮)
  • Zheng Zhang (张铮)
  • Xiaomei Zhang (张晓梅)
  • Li Wang (汪莉)Email author
  • Yue Zhang (张跃)Email author


ZnO is a typical direct wide-bandgap semiconductor material, which has various morphologies and unique physical and chemical properties, and is widely used in the fields of energy, information technology, biomedicine, and others. The precise design and controllable fabrication of nanostructures have gradually become important avenues to further enhancing the performance of ZnO-based functional nanodevices. This paper introduces the continuous development of patterning technologies, provides a comprehensive review of the optical lithography and laser interference lithography techniques for the controllable fabrication of ZnO nanostructures, and elaborates on the potential applications of such patterned ZnO nanostructures in solar energy, water splitting, light emission devices, and nanogenerators. Patterned ZnO nanostructures with highly controllable morphology and structure possess discrete three-dimensional space structure, enlarged surface area, and improved light capture ability, which realize the efficient carrier regulation, achieve highly efficient energy conversion, and meet the diverse requirements of functional nanodevices. The patterning techniques proposed for the precise design of ZnO nanostructures not only have important guiding significance for the controllable fabrication of complex nanostructures of other materials, but also open up a new route for the further development of functional nanostructures.


patterned ZnO nanorod arrays laser interference lithography optical lithography energy conversion devices 



ZnO作为典型的直接带隙宽禁带半导体材料具有丰富的形貌结构和独特的物理、 化学性能, 被广泛应用于能源、 信息技术、 生物医学等领域. 目前纳米结构的精确设计与可控制备已成为改善ZnO基功能型纳器件性能的重要手段. 本论文介绍了利用图案化技术对ZnO纳米结构进行限域生长的技术手段, 重点综述了光刻技术和激光干涉模板法在精细ZnO纳米结构制备方面的研究进展, 及其在光伏电池、 光电化学电池、 发光器件和纳米发电机四种能量转换器件中的应用. 形貌结构可调的ZnO纳米结构具有分立的高精度空间纳米结构、 增大的比表面积、 提升的光子捕获能力, 在与其他材料复合时利于实现高效的载流子行为调控, 获得了高效的能量转换, 满足了不同 功能型纳器件对材料结构的需求. 针对ZnO纳米结构精确设计所发展的一系列图案化技术对其他材料的复杂纳米结构可控制备具有重要的指导意义, 亦为功能型纳器件的进一步发展开辟了一个全新的途径.



This work was supported by the National Key Research and Development Program of China (2013CB932602 and 2016YFA0202701), the Program of Introducing Talents of Discipline to Universities (B14003), the National Natural Science Foundation of China (51527802, 51232001, 51372020 and 51602020), Beijing Municipal Science & Technology Commission (Z151100003315021), and China Postdoctoral Science Foundation (2016M600039).


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Copyright information

© Science China Press and Springer-Verlag GmbH Germany, part of Springer Nature 2017

Authors and Affiliations

  • Haonan Si (司浩楠)
    • 1
  • Zhuo Kang (康卓)
    • 1
  • Qingliang Liao (廖庆亮)
    • 1
  • Zheng Zhang (张铮)
    • 1
  • Xiaomei Zhang (张晓梅)
    • 2
  • Li Wang (汪莉)
    • 3
    Email author
  • Yue Zhang (张跃)
    • 1
    • 4
    Email author
  1. 1.State Key Laboratory for Advanced Metals and Materials, School of Materials Science and EngineeringUniversity of Science and Technology BeijingBeijingChina
  2. 2.Department of Mechanical EngineeringTokyo Institute of TechnologyTokyoJapan
  3. 3.Civil and Environment Engineering SchoolUniversity of Science and Technology BeijingBeijingChina
  4. 4.Beijing Municipal Key Laboratory of New Energy Materials and TechnologiesUniversity of Science and Technology BeijingBeijingChina

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