Experimental Techniques

, Volume 41, Issue 6, pp 627–634 | Cite as

External Alignment Marks Technique for Front-to-Back Side Alignment Using Single-Side Mask Aligner

  • H. Abdollahi
  • F. Samaeifar
  • A. Afifi
  • M.R. Aliahmadi
Article
First Online:
Received:
Accepted:

Abstract

Some sensors based on Micro-Electro-Mechanical System (MEMS) require lithographic process on both sides of the wafer. In these cases, it is important to provide patterns alignment carefully on both sides of a substrate. To achieve such purpose, a Double-Sided mask (DSM) aligner system is needed which is not found in research centers with limited equipment. In this work, a simple technique for Front-to-Back Side (FBS) alignment is presented using standard Single Side Mask (SSM) aligner system, which is accessible even in laboratories with limited facilities. The essential component of the proposed technique is to utilize external alignment marks (EAM) on the transparent substrate. EAM technique is an uncomplicated and low cost approach that requires no specialized technical knowledge. The transparent substance is attached to a specimen and expands it to get EAM features. A particular process is planned that leads to experimental results. The results indicate that the alignment offset in the center of the specimen is less than the sides. After applying statistical analysis on obtained experimental data and ensuring of normal data distribution, the following values are calculated respectively, along x and y axes: (1) accuracy (10.96 μm and 7.96 μm); (2) precision (2.68 μm and 2.77 μm); (3) standard deviation of repeatability (2.78 μm and 2.69 μm); and (4) reproducibility along (3.09 μm and 4.61 μm). The results demonstrate that EAM is practically reliable to minimize the alignment offset. It has an acceptable precision for MEMS applications as well.

Keywords

Double side lithography Front-to-back side alignment MEMS EAM 

Abbreviations

MEMS

Micro-Electro-Mechanical System

DSM

Double-Sided mask

EAM

External alignment markers

FBS

Front-to-Back Side

SSM

standard Single Side Mask

\( \overline{x} \)

Error for each specimen

x

Error at each specimen point

n

Number of measured points for a specimen

p

Denotes the number of specimens

S

Standard deviation

Sr

Standard deviation of Repeatability

SR

Standard deviation of reproducibility

Sx

Mean standard deviation for specimens

\( \overline{X} \)

Mean of mean error of specimens

Dx

Horizontal misalignment

Dy

Vertical misalignment

DT

Total misalignment

This is a preview of subscription content, log in to check access.

References

  1. 1.
    Hwang J, Shin K-S, Roh J-H, Lee D-S, Choa S-H (2011) Development of micro-heaters with optimized temperature compensation design for gas sensors. Sensors 11:2580–2591.  https://doi.org/10.3390/s110302580 CrossRefGoogle Scholar
  2. 2.
    Ma R-H, Wang Y-H, Chiang S-L, Lee C-Y (2011) Fabrication and characterization of MEMS-based flow sensors based on hot films. Microsyst Technol 17:655–660.  https://doi.org/10.1007/s00542-010-1156-z CrossRefGoogle Scholar
  3. 3.
    Dai C-L (2007) A capacitive humidity sensor integrated with micro heater and ring oscillator circuit fabricated by CMOS–MEMS technique. Sensors Actuators B Chem 122:375–380.  https://doi.org/10.1016/j.snb.2006.05.042 CrossRefGoogle Scholar
  4. 4.
    Kimura M, Manaka J, Satoh S, Takano S, Igarashi N, Nagai K (1995) A new type humidity sensor using micro-air-bridge heaters. Microsyst Technol 1:143–148.  https://doi.org/10.1007/BF01294807 CrossRefGoogle Scholar
  5. 5.
    Konz W, Hildenbrand J, Bauersfeld M, Hartwig S, Lambrecht A, Lehmann V et al (2005) Micromachined IR-source with excellent blackbody like behaviour. In: Microtechnologies for the New Millennium 2005, pp 540–548.  https://doi.org/10.1117/12.608712
  6. 6.
    Schwerter M, Gräbner D, Hecht L, Vierheller A, Leester-Schädel M, Dietzel A (2016) Surface-passive pressure sensor by femtosecond laser glass structuring for Flip-Chip-in-foil integration. J Microelectromech Syst 25(3):517–523.  https://doi.org/10.1109/JMEMS.2016.2539202 CrossRefGoogle Scholar
  7. 7.
    Gulari MN, Ghannad-Rezaie M, Novelli P, Chronis N, Marentis TC (2015) An implantable X-ray-based blood pressure microsensor for coronary in-stent restenosis surveillance and prevention. J Microelectromech Syst 24(1):50–61.  https://doi.org/10.1109/JMEMS.2014.2369857 CrossRefGoogle Scholar
  8. 8.
    Xu T, Zhao L, Jiang Z, Guo X, Ding J, Xiang W, Zhao Y (2016) A high sensitive pressure sensor with the novel bossed diaphragm combined with peninsula-island structure. Sensors Actuators A Phys 244(15):66–76.  https://doi.org/10.1016/j.sna.2016.04.027 CrossRefGoogle Scholar
  9. 9.
    Ihring A, Kessler E, Dillner U, Schinkel U, Kunze M, Billat S (2015) A planar thin-film Peltier cooler for the thermal management of a dew-point sensor system. J Microelectromech Syst 24(4):990–996.  https://doi.org/10.1109/JMEMS.2014.2367103 CrossRefGoogle Scholar
  10. 10.
    Courbat J, Canonica M, Teyssieux D, Briand D, De Rooij N (2010) Design and fabrication of micro-hotplates made on a polyimide foil: electrothermal simulation and characterization to achieve power consumption in the low mW range. J Micromech Microeng 21:015014.  https://doi.org/10.1088/0960-1317/21/1/015014 CrossRefGoogle Scholar
  11. 11.
    Elmi I, Zampolli S, Cozzani E, Mancarella F, Cardinali G (2008) Development of ultra-low-power consumption MOX sensors with ppb-level VOC detection capabilities for emerging applications. Sensors Actuators B Chem 135:342–351.  https://doi.org/10.1016/j.snb.2008.09.002 CrossRefGoogle Scholar
  12. 12.
    Wu Z, Wang X, Liu L (2015) A passive vapor-feed direct methanol fuel cell based on a composite pervaporation membrane. J Microelectromech Syst 24(1):207–215.  https://doi.org/10.1109/JMEMS.2014.2327163 CrossRefGoogle Scholar
  13. 13.
    Moghimi MJ, Dickensheets DL (2015) Electrostatic-pneumatic membrane mirror with positive or negative variable optical power. J Microelectromech Syst 24(3):716–729.  https://doi.org/10.1109/JMEMS.2014.2346758 CrossRefGoogle Scholar
  14. 14.
    Dong M, Iervolino E, Santagata F, Zhang G, Zhang G (2016) Silicon Microfabrication based Particulate Matter Sensor. Sensors Actuators A Phys.  https://doi.org/10.1016/j.sna.2016.05.036 Available online 31 May 2016
  15. 15.
    Chen T, Shafai C, Rajapakse A, Liyanage JSH, Neusitzer TD (2016) Micromachined ac/dc electric field sensor with modulated sensitivity. Sensors Actuators A Phys 245(1):76–84.  https://doi.org/10.1016/j.sna.2016.04.054 CrossRefGoogle Scholar
  16. 16.
    Chang W-Y, Hsihe Y-S (2016) Multilayer microheater based on glass substrate using MEMS technology. Microelectron Eng 149(5):25–30.  https://doi.org/10.1016/j.mee.2015.09.005 CrossRefGoogle Scholar
  17. 17.
    Yoshida S, Hanzawa H, Wasa K, Tanaka S (2016) Fabrication and characterization of large figure-of-merit epitaxial PMnN-PZT/Si transducer for piezoelectric MEMS sensors. Sensors Actuators A Phys 239(1):201–208.  https://doi.org/10.1016/j.sna.2016.01.031 CrossRefGoogle Scholar
  18. 18.
    Schurz D, Flack WW, Hsieh RL (2005) Dual side lithography measurement, precision and accuracy. In: Proceedings of the SPIE, Volume 5752, p. 905.  https://doi.org/10.1117/12.598861
  19. 19.
    Van Dung D (2009) Research on optimal silicon etching condition in TMAH solution and application MEMS structure fabrication. VNU Journal of Science: Mathematics-Physics 25(3):161–167Google Scholar
  20. 20.
    Kim ES, Muller RS, Hijab RS (1992) Front-to-backside alignment using resist-patterned etch control and one etching step. Microelectromech Sys, J 1:95–99.  https://doi.org/10.1109/84.157364 CrossRefGoogle Scholar
  21. 21.
    Abdollahi H, Hajghassem H, Mohajerzadeh S (2014) Simple fabrication of an uncooled al/SiO2 microcantilever IR detector based on bulk micromachining. Microsyst Technol 20:387–396.  https://doi.org/10.1007/s00542-013-1854-4 CrossRefGoogle Scholar
  22. 22.
    Samaeifar F, Afifi A, Abdollahi H (2014) Simple fabrication and characterization of a platinum microhotplate based on suspended membrane structure. Exp Tech.  https://doi.org/10.1111/ext.12117
  23. 23.
    Samaeifar F, Hajghassem H, Afifi A, Abdollahi H (2015) Implementation of high-performance MEMS platinum micro-hotplate. Sens Rev 35:116–124.  https://doi.org/10.1108/SR-05-2014-654 CrossRefGoogle Scholar
  24. 24.
    ASTM E (2008) Standard practice for use of the terms precision and bias in ASTM test methods. ASTM International.  https://doi.org/10.1520/E0177-14
  25. 25.
    ASTM E (2003) 691–99. Standard practice for conducting an interlaboratory study to determine the precision of a test method. Annu. Book of ASTM Stand 14:203–224.  https://doi.org/10.1520/E0691-15
  26. 26.
    Lyu J, Chen M-N (2008) Gauge capability studies for attribute data. Qual Reliab Eng Int 24:71.  https://doi.org/10.1002/qre.868 CrossRefGoogle Scholar
  27. 27.
    Daniel WW (1990) Applied nonparametric statistics. PWS-Kent Publishing, BostonGoogle Scholar

Copyright information

© The Society for Experimental Mechanics, Inc 2017

Authors and Affiliations

  • H. Abdollahi
    • 1
  • F. Samaeifar
    • 2
  • A. Afifi
    • 2
  • M.R. Aliahmadi
    • 2
  1. 1.Department of Electrical EngineeringShahid Sattari Aeronautical University of Science and TechnologyTehranIran
  2. 2.Department of Electrical EngineeringMalek Ashtar University of TechnologyTehranIran

Personalised recommendations