Advertisement

Laminated Structure of Al2O3 and TiO2 for Enhancing Performance of Reverse Electrowetting-On-Dielectric Energy Harvesting

  • Hwichul Yang
  • Hojae Lee
  • Yonghyun Lim
  • Maria Christy
  • Young-Beom KimEmail author
Regular Paper
  • 29 Downloads

Abstract

Reverse electrowetting-on-dielectric (REWOD) is a novel energy harvesting technique that has been gaining considerable amount of attention owing to its high power output even with the small amount of disturbance. To enhance the output power of REWOD, the dielectric layers in the system require a high capacitance. Nevertheless, current leakage is inevitable in such high-k dielectric materials. In this work, the application of a high-k dielectric material TiO2 has been investigated along with a new leakage barrier layer Al2O3 that acts as a lamination, in order to minimize the current leakage and maximize the power output. As expected, the laminated structure with TiO2 and Al2O3 exhibited reduced current leakage and relatively high capacitance compared to the single layer of TiO2 or Al2O3, respectively. As the electrical energy is generated through the interaction of liquid droplets and the multilayered dielectric film, the energy-harvesting performance displayed different behavior about current generation with respect to the top surface material that is in contact with the conductive droplet. Overall, the laminated REWOD energy harvesting system produced an enhanced power density of 15.36 mW cm−2 at a low bias voltage.

Keywords

Energy harvesting Reverse electrowetting-on-dielectric Metal oxide thin films Leakage current Laminated structure 

Notes

Acknowledgements

This research was supported by Basic Science Research Program through the National Research Foundation of Korea(NRF) funded by the Ministry of Education(2012R1A6A1029029).

REFERENCES

  1. 1.
    Priya, S., & Inman, D. J. (2009). Energy harvesting technologies. New york: Springer.CrossRefGoogle Scholar
  2. 2.
    Kim, H. S., Kim, J.-H., & Kim, J. (2011). A review of piezoelectric energy harvesting based on vibration. International Journal of Precision Engineering and Manufacturing, 12, 1129–1141.CrossRefGoogle Scholar
  3. 3.
    Park, J.-H., Lim, T.-W., Kim, S.-D., & Park, S.-H. (2016). Design and experimental verification of flexible plate-type piezoelectric vibrator for energy harvesting system. International Journal of Precision Engineering and Manufacturing-Green Technology, 3, 253–259.CrossRefGoogle Scholar
  4. 4.
    Kim, J. E., Kim, H., Yoon, H., Kim, Y. Y., & Youn, B. D. (2015). An energy conversion model for cantilevered piezoelectric vibration energy harvesters using only measurable parameters. International Journal of Precision Engineering and Manufacturing-Green Technology, 2, 51–57.CrossRefGoogle Scholar
  5. 5.
    Usharani, R., Uma, G., & Umapathy, M. (2016). Design of high output broadband piezoelectric energy harvester with double tapered cavity beam. International Journal of Precision Engineering and Manufacturing-Green Technology, 3, 343–351.CrossRefGoogle Scholar
  6. 6.
    Wang, Z. L., & Wu, W. (2012). Nanotechnology-enabled energy harvesting for self-powered micro-/nanosystems. Angewandte Chemie International Edition, 51, 11700–11721.CrossRefGoogle Scholar
  7. 7.
    Zorzi, M., Gluhak, A., Lange, S., & Bassi, A. (2010). From today’s intranet of things to a future internet of things: a wireless- and mobility-related view. IEEE Wireless Communicatins, 17(6), 44–51.CrossRefGoogle Scholar
  8. 8.
    Hu, R., Cola, B. A., Haram, N., Barisci, J. N., Lee, S., Stoughton, S., et al. (2010). Harvesting waste thermal energy using a carbon-nanotube-based thermo-electrochemical cell. Nano Letters, 10, 838–846.CrossRefGoogle Scholar
  9. 9.
    Zhu, G., Su, Y., Bai, P., Chen, J., Jing, Q., Yang, W., et al. (2014). Harvesting water wave energy by asymmetric screening of electrostatic charges on a nanostructured hydrophobic thin-film surface. ACS Nano, 8, 6031–6037.CrossRefGoogle Scholar
  10. 10.
    Naruse, Y., Matsubara, N., Mabuchi, K., Izumi, M., & Suzuki, S. (2009). Electrostatic micro power generation from low-frequency vibration such as human motion. Journal of Micromechanics and Microengineering, 19, 094002.CrossRefGoogle Scholar
  11. 11.
    Zorlu, Ö., Tropal, E. T., & Kulah, H. (2011). A vibration-based electromagnetic energy harvester using mechanical frequency up-conversion method. IEEE Sensors Journal, 11, 481–488.CrossRefGoogle Scholar
  12. 12.
    Wang, S., Lin, L., & Wang, Z. L. (2012). Nanoscale triboelectric-effect-enabled energy conversion for sustainably powering portable electronics. Nano Letters, 12, 6339–6346.CrossRefGoogle Scholar
  13. 13.
    Moon, J. K., Jeong, J., Lee, D., & Pak, H. K. (2013). Electrical power generation by mechanically modulating electrical double layers. Nature Communications, 4, 1487.CrossRefGoogle Scholar
  14. 14.
    Kwon, S.-H., Park, J., Kim, W. K., Yang, Y., Lee, E., Han, C. J., et al. (2014). An effective energy harvesting method from a natural water motion active transducer. Energy & Environmental Science, 7, 3279–3283.CrossRefGoogle Scholar
  15. 15.
    Kim, S., Choi, S. J., Zhao, K., Yang, H., Gobbi, G., Zhang, S., et al. (2016). Electrochemically driven mechanical energy harvesting. Nature Communications, 7, 10146.CrossRefGoogle Scholar
  16. 16.
    Kim, S. H., Haines, C. S., Li, N., Kim, K. J., Mun, T. J., Choi, C., et al. (2017). Harvesting electrical energy from carbon nanotube yarn twist. Science, 357, 773–778.CrossRefGoogle Scholar
  17. 17.
    Krupenkin, T., & Taylor, J. A. (2011). Reverse electrowetting as a new approach to high-power energy harvesting. Nature Communications, 2, 448.CrossRefGoogle Scholar
  18. 18.
    Hsu, T. H., Manakasettham, S., Taylor, J. A., & Krupendin, T. (2015). Bubbler: a novel ultra-high power density energy harvesting method based on reverse electrowetting. Scientific Reports, 5, 16537.CrossRefGoogle Scholar
  19. 19.
    Yang, H., Hong, S., Koo, B., Lee, D., & Kim, Y.-B. (2017). High-performance reverse electrowetting energy harvesting using atomic-layer-deposited dielectric film. Nano Energy, 31, 450–455.CrossRefGoogle Scholar
  20. 20.
    An, J., Usui, T., Logar, M., Park, J., Thian, D., Kim, S., et al. (2014). Plasma processing for crystallization and densification of atomic layer deposition BaTiO3 thin films. ACS Applied Materials & Interfaces, 6, 10656–10660.CrossRefGoogle Scholar
  21. 21.
    Aarik, J., Aidla, A., Kiisler, A.-A., Uustare, T., & Sammelselg, V. (1997). Effect of crystal structure on optical properties of TiO2 films grown by atomic layer deposition. Thin Solid Films, 305, 270–273.CrossRefGoogle Scholar
  22. 22.
    Kadosima, M., Hiratani, M., Shimamoto, Y., Torii, K., Miki, H., Kiruma, S., et al. (2003). Rutile-type TiO2 thin film for high-k gate insulator. Thin Solid Films, 424, 224–228.CrossRefGoogle Scholar
  23. 23.
    Usui, T., Mollinger, S. A., Iancu, A. T., Reis, T. N., & Prinz, F. B. (2012). High aspect ratio and high breakdown strength metal-oxide capacitors. Applied Physics Letters, 101, 033905.CrossRefGoogle Scholar
  24. 24.
    Di Paola, A., Bellardita, M., & Palmisano, L. (2013). Brookite, the least known TiO2 photocatalyst. Catalysts, 3, 36–73.CrossRefGoogle Scholar
  25. 25.
    Palomares, E., Clifford, J. N., Haque, S. A., Lutz, T., & Durrant, J. R. (2003). Control of charge recombination dynamics in dye sensitized solar cells by the use of conformally deposited metal oxide blocking layers. Journal of the American Chemical Society, 125, 475–482.CrossRefGoogle Scholar
  26. 26.
    Tzeng, S.-D., & Gwo, S. (2016). Charge trapping properties at silicon nitride/silicon oxide interface studied by variable-temperature electrostatic force microscopy. Journal of Applied Physics, 100, 023711.CrossRefGoogle Scholar
  27. 27.
    Basset, P., Galayko, D., Mahmood Paracha, A., Marty, F., Dudka, A., & Bourouina, T. (2009). A batch-fabricated an electret-free silicon electrostatic vibration energy harvester. Journal of Micromechanics and Microengineering, 19, 115025.CrossRefGoogle Scholar
  28. 28.
    Huynh, D. H., Nguyen, T. C., Nguyen, P. D., Abeyrathne, C. D., Hossain, Md S, Evans, R., et al. (2016). Environmentally friendly power generator based on moving liquid dielectric and double layer effect. Scientific Reports, 6, 26708.CrossRefGoogle Scholar

Copyright information

© Korean Society for Precision Engineering 2019

Authors and Affiliations

  • Hwichul Yang
    • 1
  • Hojae Lee
    • 1
  • Yonghyun Lim
    • 1
  • Maria Christy
    • 1
  • Young-Beom Kim
    • 1
    • 2
    Email author
  1. 1.Department of Mechanical Convergence EngineeringHanyang UniversitySeoulRepublic of Korea
  2. 2.Institute of Nano Science and TechnologyHanyang UniversitySeoulRepublic of Korea

Personalised recommendations