Macromolecular Research

, Volume 20, Issue 11, pp 1131–1136 | Cite as

Structural analysis of high molecular weight PMSQs and their related properties for interlayer dielectric (ILD) application

  • He Seung Lee
  • Seung-Sock Choi
  • Kyung-Youl Baek
  • Eung Chan Lee
  • Soon Man Hong
  • Jong-Chan Lee
  • Seung Sang Hwang
Articles
First Online:
Received:
Revised:
Accepted:

Abstract

A series of high molecular weight polymethylsilsesquioxanes (PMSQs) were synthesized through polymerization of an isolated hydroxyl-substituted cyclic siloxane stereoisomer, cis-trans-cis 1,3,5,7 tetramethyl 1,3,5,7 tetrahydroxyl cyclosiloxane, for interlayer dielectric (ILD) application as low dielectric materials. The molecular weights of PMSQs were controlled by varying polycondensation time. Structural analyses of the obtained PMSQs were carried out by gel chromatography (GPC), FTIR, 29Si NMR, static light scattering (SLS), solution X-ray scattering, and X-ray diffraction. The change in molecular shape of the PMSQs went from linear to branched in structure as molecular weight increased. Furthermore, thin film properties were investigated for application as interlayer dielectric materials. As structural branching increased, its properties showed isotropic tendencies, relatively high modulus (5.4 GPa), and low dielectric constant (2.74) with increase in the inter-molecular space.

Keywords

polymethylsilsesquioxane high molecular weight polymer shape dielectric 
This is a preview of subscription content, log in to check access.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

Supplementary material

13233_2012_168_MOESM1_ESM.pdf (2.7 mb)
Supplementary material, approximately 2.71 MB.

References

  1. (1).
    M. Morgen, E. T. Ryan, J. Zhao, C. Hu, T. Cho, and P. S. Ho, Annu. Rev. Mater. Sci., 30, 645 (2000).CrossRefGoogle Scholar
  2. (2).
    B. Voit, J. Polym. Sci. Part A: Polym. Chem., 38, 2505 (2000).CrossRefGoogle Scholar
  3. (3).
    A. S. Mathews, I. Kim, and C. S. Ha, Macromol. Res., 15, 114 (2007).CrossRefGoogle Scholar
  4. (4).
    B. J. Cha, S. Kim, and K. Char, Macromol. Res., 13, 176 (2005).CrossRefGoogle Scholar
  5. (5).
    D. Lee, Y. A. Kim, Y. B. Kim, J. K. Kim, and Y. K. Han, Macromol. Res., 16, 353 (2008).CrossRefGoogle Scholar
  6. (6).
    S. E. Rankin, L. J. Kasehagen, A. V. McCormick, and C. W. Macosko, Macromolecules, 33, 7639 (2000).CrossRefGoogle Scholar
  7. (7).
    J. D. Mackenzie, J. Non-Cryst. Solids, 100, 162 (1988).CrossRefGoogle Scholar
  8. (8).
    J. K. Lee, K. Char, H. W. Rhee, H. W. Ro, D. Y. Yoo, and D. Y. Yoon, Polymer, 42, 9085 (2001).CrossRefGoogle Scholar
  9. (9).
    L. H. Lee, W. C. Chen, and W. C. Liu, J. Polym. Sci. Part A: Polym. Chem., 40, 1560 (2002).CrossRefGoogle Scholar
  10. (10).
    N. P. Hacker, G. Davis, L. Figge, T. Krajewski, S. Lefferts, J. Nedbal, and R. Spear, Mat. Res. Soc. Symp. Proc., 476, 25 (1997).CrossRefGoogle Scholar
  11. (11).
    J. Bolze, J. Kim, B. Lee, T. J. Shin, J.-Y. Huang, S. Rah, H. S. Youn, M. Ree, Macromol. Res., 10, 2 (2002).CrossRefGoogle Scholar
  12. (12).
    H. S. Lee, S.-S. Choi, K.-Y. Baek, S. M. Hong, E. C. Lee, J.-C. Lee, and S. S. Hwang, Eur. Polym. J., 48, 1073 (2012).CrossRefGoogle Scholar
  13. (13).
    Tverdokhlebova II, T. A. Larina, Russ Chem Rev, 44, 170 (1975).CrossRefGoogle Scholar
  14. (14).
    E. S. Park, H. W. Ro, C. V. Nguyen, R. L. Jaffe, and D. Y. Yoon, Chem. Mater., 20, 1548 (2008).CrossRefGoogle Scholar
  15. (15).
    Y. C. Chiu, C. C. M. Ma, F. Y. Liu, I. C. Chou, C. L. Chaing, and J. C. Yang, J. Appl. Polym. Sci., 114, 3 (2009).CrossRefGoogle Scholar
  16. (16).
    M. A. Hoque, Y. Kakihani, S. Shinke, and Y. Kawakami, Macromolecules, 42, 3309 (2009).CrossRefGoogle Scholar
  17. (17).
    S. Chang, T. Matsumoto, H. Matsumoto, and M. Unno, Appl. Organomet. Chem., 24, 241 (2010).CrossRefGoogle Scholar
  18. (18).
    C. Jana, G. Jayamurugan, R. Ganapathy, P. K. Maiti, N. Jayaraman, and A. K. Sood, J. Chem. Phys., 124, 204719 (2006).CrossRefGoogle Scholar
  19. (19).
    E. De Luca and R. W. Richards, J. Polym. Sci. Part B: Polym. Phys., 41, 1339 (2003).CrossRefGoogle Scholar
  20. (20).
    S. Mikoshiba and S. Hayase, J. Mat. Chem., 9, 591 (1999).CrossRefGoogle Scholar
  21. (21).
    B. R. Kim, J. W. Kang, K. Y. Lee, J. M. Son, and M. K. Ko, J. Mat. Sci., 42, 4591 (2007).CrossRefGoogle Scholar
  22. (22).
    M. C. Rubinstein and H. Ralph, Polymer Physics. Oxford, Oxford University Press, New York, 2003.Google Scholar

Copyright information

© The Polymer Society of Korea and Springer Sciene+Business Media Dordrecht 2012

Authors and Affiliations

  • He Seung Lee
    • 1
    • 2
  • Seung-Sock Choi
    • 1
  • Kyung-Youl Baek
    • 1
  • Eung Chan Lee
    • 1
  • Soon Man Hong
    • 1
  • Jong-Chan Lee
    • 2
  • Seung Sang Hwang
    • 1
  1. 1.Nanohybrids Research CenterKorea Institute of Science TechnologySeoulKorea
  2. 2.Department of Chemical and Biological EngineeringSeoul National UniversitySeoulKorea

Personalised recommendations