Fundamental understanding and modeling of spin coating process: A review
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A mathematical model is derived to elucidate the dominant mechanism governing film formation. It leads to a relation between film thickness and film radius spreading with time. Inclusion of evaporation and shear stress was made with extension to non-Newtonian fluid. The advantages and disadvantages of this process with applications are reviewed.
KeywordsSpin coating film thickness shear stress non-Newtonian fluids
PACS Nos.40 45.20.D, 47.50.-d, 68 68.55.-a, 68.55.jd
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