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, Volume 11, Issue 1, pp 407–414 | Cite as

Optimisation of Process Parameters of Chemical Mechanical Polishing of Soda Lime Glass

  • C. Ramesh KumarEmail author
  • M. Omkumar
Original Paper
  • 24 Downloads

Abstract

Soda Lime glass continues to be a common variety of glass used in majority of applications. Thus for various applications to be involved in a smooth surface is the demand in the industry for commercial usage. The polishing of glass using Chemical Mechanical Polishing continues to be a major challenge in polishing of glass. The Soda lime glass used was polished considering Slurry Flow Rate, Speed and Down Pressure and Process time as the major influencing parameters and was examined for Surface Roughness and Material Removal Rate. Topographical studies were done on the polished surfaces using Atomic Force Microscopy (AFM) to compare the surface peaks. The Taguchi’s Design of Experiments was implemented to obtain the best combination of parameters. Analysis of Variance was also done to verify the significant of the combination of the parameters.

Keywords

Soda lime glass Chemical mechanical planarization Taguchi MRR SR Cerium oxide ANOVA 

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Copyright information

© Springer Science+Business Media B.V., part of Springer Nature 2018

Authors and Affiliations

  1. 1.Department of Manufacturing EngineeringAnna UniversityChennaiIndia

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