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Characterization and analysis of DLC films with different thickness deposited by RF magnetron PECVD

Abstract

Diamond-like carbon (DLC) films have excellent mechanical and chemical properties similar to those of crystalline diamond giving them wide applications as protective coatings. So far, a variety of methods are employed to deposit DLC films. In this study, DLC films with different thicknesses were deposited on Si and glass substrates using RF magnetron PECVD method with C4H10 as carbon source. The bonding microstructure, surface morphology and tribological properties at different growing stages of the DLC films were tested. Raman spectra were deconvoluted into D peak at about 1370 cm−1 and G peak around 1590 cm−1, indicating typical features of the DLC films. A linear relationship between the film thickness and the deposition time was found, revealing that the required film thickness may be obtained by the appropriate tune of the deposition time. The concentration of sp3 and sp2 carbon atoms in the DLC films was measured by XPS spectra. As the films grew, the sp3 carbon atoms decreased while sp2 atoms increased. Surface morphology of the DLC films clearly showed that the films were composed of spherical carbon clusters, which tended to congregate as the deposition time increased. The friction coefficient of the films was very low and an increase was also found with the increase of film thickness corresponding to the results of XPS spectra. The scratch test proved that there was good bonding between the DLC films and the substrates.

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References

  1. [1]

    Aisenberg S., and Chabot R., Ion-beam deposition of thin films of diamond-like carbon, J. Appl. Phys., 1971, 42 2953.

    Article  CAS  Google Scholar 

  2. [2]

    Robertson J., Diamond-like amorphous carbon, Mater. Sci. Eng. R Rep., 2002, 37(4–6): 129.

    Article  Google Scholar 

  3. [3]

    Zhang S., and Lam Bui X., Towards high adherent and tough a-C coatings, Thin Solid Films, 2005, 482(1–2): 138.

    Article  CAS  Google Scholar 

  4. [4]

    Yamamoto T., and Hyodo H., Amorphous carbon overcoat for thin-film disk, Tribology International,, 2003, 36(4–6): 483.

    Article  CAS  Google Scholar 

  5. [5]

    Kumar A., and Ekanayake U., Characterization of pulsed laser-deposited diamond-like carbon films, Surf. Coat. Technol., 1998, 102(1–2): 113.

    Article  CAS  Google Scholar 

  6. [6]

    Wu J.B., and Chang J.J., Characterization of diamond-like carbon coatings prepared by pulsed bias cathodic vacuum arc deposition, Thin Solid Films, 2007, 516(2–4): 243.

    Article  CAS  Google Scholar 

  7. [7]

    Jarratt M., and Stallard J., An improved diamond-like carbon coating with exceptional wear properties, Diamond Relat. Mater., 2003, 12(3–7): 1003.

    Article  CAS  Google Scholar 

  8. [8]

    Ahmad I., and Roy S.S., Substrate effects on the microstructure of hydrogenated amorphous carbon films, Current Appl. Phys., 2009, 9(5): 937.

    Article  Google Scholar 

  9. [9]

    Kim Y.T., and Cho S.M., Dependence of the bonding structure of DLC thin films on the deposition conditions of PECVD method, Surf. Coat. Technol., 2003, 169–170: 291

    Article  Google Scholar 

  10. [10]

    Yong Yun D., and Seok Choi W., Effect of H2 and O2 plasma etching treatment on the surface of diamond-like carbon thin film, Appl. Surf. Sci., 2008, 254(23): 7925.

    Article  Google Scholar 

  11. [11]

    Anita V., and Saito N., Magnetron plasma-enhanced chemical vapor deposition of diamond-like carbon thin films, Thin Solid Films, 2006, 506: 63.

    Article  Google Scholar 

  12. [12]

    Erdemir A., The role of hydrogen in tribological properties of diamond-like carbon, Surf. Coat. Technol., 2001, 146–147: 292.

    Article  Google Scholar 

  13. [13]

    Bui X.L., Pei Y.T., Mulder E.D.G., and De Hosson J.Th.M., Adhesion improvement of hydrogenated diamond-like carbon thin films by pre-deposition plasma treatment of rubber substrate, Surf. Coat. Technol., 2009, 203(14): 1964.

    Article  CAS  Google Scholar 

  14. [14]

    Wei C.H., Yang J.F., and Tai F.C., The stress reduction effect by interlayer deposition or film thickness for diamond like carbon on rough surface, Diamond Relat. Mater., 2010, 19(5–6): 518.

    Article  CAS  Google Scholar 

  15. [15]

    Baek S.M., Tatsuru Shirafuji, Nagahiro Saito, and Osamu Takai, Adhesion property of SiOx-doped Diamond-like Carbon Films Deposited on Polycarbonate by Inductively Coupled Plasma Chemical Vapor Deposition, Thin Solid Films, 2011, 519(20): 6678.

    Article  CAS  Google Scholar 

  16. [16]

    Ahmed Sk.F., Banerjee D., Mitra M.K., and Chattopadhyay K.K., Visible photoluminescence from silicon-incorporated diamond like carbon films synthesized via direct current PECVD technique, Journal of Luminescence, 2011, 131(11): 2352.

    Article  CAS  Google Scholar 

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Correspondence to Musen Li.

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Huang, Y., Wang, Q., Wang, M. et al. Characterization and analysis of DLC films with different thickness deposited by RF magnetron PECVD. Rare Metals 31, 198–203 (2012). https://doi.org/10.1007/s12598-012-0491-x

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Keywords

  • DLC films
  • radio frequency magnetron PECVD
  • characterization
  • thickness