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Design and Test of the MEMS Coupled Piezoelectric–Electromagnetic Energy Harvester

  • Lian-min CaoEmail author
  • Zhi-xu Li
  • Cheng Guo
  • Peng-peng Li
  • Xiang-qiang Meng
  • Ting-ming Wang
Regular Paper

Abstract

This paper researches on the design and test of the output performance of double-end clamped MEMS coupled piezoelectric–electromagnetic energy harvester. It establishes the theoretical output model of the double-end clamped rectangular beam and trapezoidal beam piezoelectric–electromagnetic energy harvester, and optimizes the structure parameters of piezoelectric and electromagnetic unit with simulation analysis. It also respectively realizes the processing of piezoelectric and electromagnetic unit by MEMS and flexible PCB technology, and completes the performance test of structure prototype through the experimental system. The result showed that the capacity of MEMS coupled piezoelectric–electromagnetic energy harvester, which taked four coil piezoelectric with integrated electromagnetic in series, was 12.23 times higher than that of piezoelectric energy harvester. Also the output voltage and power of coupled trapezoidal beam energy harvester were respectively increased 18.89% and 2.26%, compared with coupled rectangular beam energy harvester.

Keywords

Coupled energy harvester Piezoelectric Electromagnetic MEMS Double-end clamped 

List of Symbols

t

Time

mε

Equivalent mass

cε

Equivalent damping

k

Equivalent stiffness

k1, k3

Nonlinear stiffness introduced by large deformation

θ

Coupling coefficient of piezoelectricity

γ

Coupling coefficient of electromagnetism

z(t)

Displacement function

V(t)

Piezoelectric partial voltage function

i(t)

Electromagnetic partial current function

a(t)

Acceleration

μ

Calibration factor of the energy harvester system model

R1

Loading resistance of the piezoelectric part

R2

Internal equivalent resistance

R3

Loading resistance of the electromagnetic part

C

Equivalent capacitance of the piezoelectric part

L

Equivalent inductance of the electromagnetic part

Notes

Acknowledgements

This work supported by the Natural Science Foundation of Shandong Province, China (ZR201709220253).

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Copyright information

© Korean Society for Precision Engineering 2019

Authors and Affiliations

  • Lian-min Cao
    • 1
    Email author
  • Zhi-xu Li
    • 1
  • Cheng Guo
    • 1
  • Peng-peng Li
    • 1
  • Xiang-qiang Meng
    • 1
  • Ting-ming Wang
    • 1
  1. 1.College of Mechanical and Electronic EngineeringShandong University of Science and TechnologyQingdaoChina

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