Development of a novel 3-DOF suspension mechanism for multi-function stylus profiling systems

  • Jia Tian
  • Yanling Tian
  • Zhiyong Guo
  • Fujun Wang
  • Dawei Zhang
  • Xianping Liu
  • Bijian Shirinzadeh
Article
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Abstract

This paper proposes a novel 3-DOF suspension mechanism for multi-function stylus profiling systems. Incorporating an electromagnetic force actuator, the 3-DOF suspension mechanism provides a controlled loading force. For reasons of the thermal and mechanical stability, a triangular flexure structure is utilized to support the stylus. The stiffness matrix method is used to establish the analytical stiffness model of the 3-DOF suspension mechanism. Considering the 3-DOF suspension mechanism as a 3-DOF lumped-mass-spring system, the dynamic model is established. Finite element analysis (FEA) is used to validate the established static and dynamic models of the 3-DOF suspension mechanism. A prototype is fabricated and experimental tests are carried out to characterize the mechanism’s performance. The results show that the 3-DOF suspension mechanism provides a controlled force in a range of up to 10 mN and has a working range in excess of 10 μm with a first natural frequency of 342 Hz in Z axis, indicating good capability for multi-function measurements at the micro/nano scale.

Keywords

Stylus instrument Electromagnetic force actuator Flexure structure Surface profiling 
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Copyright information

© Korean Society for Precision Engineering and Springer-Verlag Berlin Heidelberg 2016

Authors and Affiliations

  • Jia Tian
    • 1
  • Yanling Tian
    • 1
    • 2
  • Zhiyong Guo
    • 1
  • Fujun Wang
    • 1
  • Dawei Zhang
    • 1
  • Xianping Liu
    • 2
  • Bijian Shirinzadeh
    • 3
  1. 1.School of Mechanical EngineeringTianjin UniversityTianjinChina
  2. 2.School of EngineeringUniversity of WarwickCoventryUK
  3. 3.Department of Mechanical and Aerospace EngineeringMonash UniversityClaytonAustralia

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