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Nano Research

, Volume 9, Issue 11, pp 3279–3290 | Cite as

Self-formation of hexagonal nanotemplates for growth of pyramidal quantum dots by metalorganic vapor phase epitaxy on patterned substrates

  • Alessandro Surrente
  • Romain Carron
  • Pascal Gallo
  • Alok Rudra
  • Benjamin Dwir
  • Eli KaponEmail author
Research Article

Abstract

We demonstrate the self-formation of hexagonal nanotemplates on GaAs (111)B substrates patterned with arrays of inverted tetrahedral pyramids during metal-organic vapor phase epitaxy and its role in producing high-symmetry, site-controlled quantum dots (QDs). By combining atomic force microscopy measurements on progressively thicker GaAs epitaxial layers with kinetic Monte Carlo growth simulations, we demonstrate self-maintained symmetry elevation of the QD formation sites from three-fold to six-fold symmetry. This symmetry elevation stems from adatom fluxes directed towards the high-curvature sites of the template, resulting in the formation of a fully three-dimensional hexagonal template after the deposition of relatively thin GaAs layers. We identified the growth conditions for consistently achieving a hexagonal pyramid bottom, which are useful for producing high-symmetry QDs for efficient generation of entangled photons.

Keywords

metalorganic vapor phase epitaxy kinetic Monte Carlo simulations epitaxial growth on patterned substrates symmetry elevation adatom diffusion 

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Self-formation of hexagonal nanotemplates for growth of pyramidal quantum dots by metalorganic vapor phase epitaxy on patterned substrates
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Supplementary material, approximately 4.45 MB.
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Supplementary material, approximately 4.78 MB.

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Copyright information

© Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2016

Authors and Affiliations

  • Alessandro Surrente
    • 1
  • Romain Carron
    • 1
  • Pascal Gallo
    • 1
  • Alok Rudra
    • 1
  • Benjamin Dwir
    • 1
  • Eli Kapon
    • 1
    Email author
  1. 1.Laboratory of Physics of NanostructuresÉcole Polytechnique Fédérale de LausanneLausanneSwitzerland

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